Effect of Temperature on MEMS Vibratory Rate Gyroscope

We report the temperature dependence of the JPL/Boeing MEMS second generation post resonator gyroscopes and determine the effect of hysteresis over the range 35degC to 65degC. The results indicate a strong linear dependence of the drive frequency and sense frequency with temperature of 0.093Hz/degC...

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Hauptverfasser:	Keymeulen, D., Peay, C., Yee, K., Li, D.L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Electrodes Frequency Gyroscopes Micromechanical devices Optical resonators Propulsion Stability Temperature dependence Temperature sensors Voltage
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creator	Keymeulen, D. Peay, C. Yee, K. Li, D.L.
description	We report the temperature dependence of the JPL/Boeing MEMS second generation post resonator gyroscopes and determine the effect of hysteresis over the range 35degC to 65degC. The results indicate a strong linear dependence of the drive frequency and sense frequency with temperature of 0.093Hz/degC and AGC bias voltage with temperature of 13mV/degC. The results also indicate a significant time lag of the gyroscope of these quantities when responding to external temperature variations but determined no hysteresis exists in the drive frequency, sense frequency, and AGC bias. Both the time-frequency and time-bias voltage relationships are of the form y = A+B*exp(-t/T) where A is an offset parameter in Hertz and Volts respectively and B depends on the magnitude of the temperature variation
doi_str_mv	10.1109/AERO.2005.1559561
format	Conference Proceeding
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Both the time-frequency and time-bias voltage relationships are of the form y = A+Bexp(-t/T) where A is an offset parameter in Hertz and Volts respectively and B depends on the magnitude of the temperature variation</description><identifier>ISSN: 1095-323X</identifier><identifier>ISBN: 9780780388703</identifier><identifier>ISBN: 0780388704</identifier><identifier>EISSN: 2996-2358</identifier><identifier>DOI: 10.1109/AERO.2005.1559561</identifier><language>eng</language><publisher>IEEE</publisher><subject>Electrodes ; Frequency ; Gyroscopes ; Micromechanical devices ; Optical resonators ; Propulsion ; Stability ; Temperature dependence ; Temperature sensors ; Voltage</subject><ispartof>2005 IEEE Aerospace Conference, 2005, p.1-6</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1559561$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,4036,4037,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1559561$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Keymeulen, D.</creatorcontrib><creatorcontrib>Peay, C.</creatorcontrib><creatorcontrib>Yee, K.</creatorcontrib><creatorcontrib>Li, D.L.</creatorcontrib><title>Effect of Temperature on MEMS Vibratory Rate Gyroscope</title><title>2005 IEEE Aerospace Conference</title><addtitle>AERO</addtitle><description>We report the temperature dependence of the JPL/Boeing MEMS second generation post resonator gyroscopes and determine the effect of hysteresis over the range 35degC to 65degC. 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The results indicate a strong linear dependence of the drive frequency and sense frequency with temperature of 0.093Hz/degC and AGC bias voltage with temperature of 13mV/degC. The results also indicate a significant time lag of the gyroscope of these quantities when responding to external temperature variations but determined no hysteresis exists in the drive frequency, sense frequency, and AGC bias. Both the time-frequency and time-bias voltage relationships are of the form y = A+B*exp(-t/T) where A is an offset parameter in Hertz and Volts respectively and B depends on the magnitude of the temperature variation</abstract><pub>IEEE</pub><doi>10.1109/AERO.2005.1559561</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record>
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subjects	Electrodes Frequency Gyroscopes Micromechanical devices Optical resonators Propulsion Stability Temperature dependence Temperature sensors Voltage
title	Effect of Temperature on MEMS Vibratory Rate Gyroscope
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