Atomic force microscopy with optical heterodyne detection method

Atomic force microscopy with optical heterodyne detection method

We report on an atomic force microscope (AFM) based on a simple optical set-up using heterodyne detection. The deflection of the cantilever in the AFM was interferometrically measured using a Michelson interferometer. At a scanning speed of 2 mum/s and an integration time of 10 ms, the measured vert...

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Bibliographische Detailangaben
Hauptverfasser: Kim, Myun-Sik, Manzardo, Omar, Dandliker, Rene, Herzig, Hans Peter, Aeschimann, Laure, Staufer, Urs, Vettiger, Peter, Lee, Jong-Hyun
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Atom optics
Atomic force microscopy
Instruments
Laser beams
Optical detectors
Optical interferometry
Optical microscopy
Optical mixing
Optical polarization
Testing
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Beschreibung
Zusammenfassung:We report on an atomic force microscope (AFM) based on a simple optical set-up using heterodyne detection. The deflection of the cantilever in the AFM was interferometrically measured using a Michelson interferometer. At a scanning speed of 2 mum/s and an integration time of 10 ms, the measured vertical resolution was 0.4 nm. The lateral resolution was 20 nm and is determined by the scanning speed and the integration time
ISSN:2160-5033
DOI:10.1109/OMEMS.2005.1540134