Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control policies to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Christopher, J., Kuhl, M.E., Hirschman, K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Analytical models Design optimization Dispatching Materials handling Performance analysis Performance evaluation Production control Semiconductor device manufacture Testing Vehicles
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