Investigation of a 3-D Capacitor Micro Strain Gauge for Applications in Biomedical and Industrial Health Monitoring

The behavior of a Capacitive Micro Strain Gauge, CMSG, consisting of two parallel plates embedded in a dielectric media, is investigated analytically and numerically. Of the particular interests to this study is the application of the Capacitive Micro Strain Gauge in on-a-chip systems for biomedical...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Shavandi, M., Moussa, W.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomedical monitoring Capacitance Capacitive sensors Capacitors Condition monitoring Conductors Dielectrics Health and safety Mechanical factors Permittivity
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page	658
container_issue
container_start_page	656
container_title
container_volume
creator	Shavandi, M. Moussa, W.A.
description	The behavior of a Capacitive Micro Strain Gauge, CMSG, consisting of two parallel plates embedded in a dielectric media, is investigated analytically and numerically. Of the particular interests to this study is the application of the Capacitive Micro Strain Gauge in on-a-chip systems for biomedical and industrial health monitoring. A combination of analytical and numerical approaches is presented to extract strain components from capacitance. The studies show that capacitance is affected by the size of dielectric. It is also explored to be a function of normal components of strain while shear components have no effect on capacitance. A suitable approach is presented to shift the actual capacitance to the theoretical capacitance.
doi_str_mv	10.1109/ICMENS.2004.1509032
format	Conference Proceeding
fullrecord	<record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_1509032</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1509032</ieee_id><sourcerecordid>1509032</sourcerecordid><originalsourceid>FETCH-ieee_primary_15090323</originalsourceid><addsrcrecordid>eNp9T8tOwzAQtFQhUUG-oJf9gYZ1HjQ-llBoDuml3KtV4oStUjuyXST-HoN6Zi6jmdGMNEKsJKZSonpq6nZ3OKYZYpHKEhXm2UIkalPh5lmVmaxUfi8S788YUZQFVtVS-MZ8aR94pMDWgB2AIF-_Qk0zdRysg5Y7Z-EYHLGBd7qOGoZob-d54u6v5SEmL2wvuo_OBGR6aEx_9cFxlHtNU_iE1prfPTbjo7gbaPI6ufGDWL3tPur9mrXWp9nxhdz36XYh_z_9Ac9VS-s</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Investigation of a 3-D Capacitor Micro Strain Gauge for Applications in Biomedical and Industrial Health Monitoring</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Shavandi, M. ; Moussa, W.A.</creator><creatorcontrib>Shavandi, M. ; Moussa, W.A.</creatorcontrib><description>The behavior of a Capacitive Micro Strain Gauge, CMSG, consisting of two parallel plates embedded in a dielectric media, is investigated analytically and numerically. Of the particular interests to this study is the application of the Capacitive Micro Strain Gauge in on-a-chip systems for biomedical and industrial health monitoring. A combination of analytical and numerical approaches is presented to extract strain components from capacitance. The studies show that capacitance is affected by the size of dielectric. It is also explored to be a function of normal components of strain while shear components have no effect on capacitance. A suitable approach is presented to shift the actual capacitance to the theoretical capacitance.</description><identifier>ISBN: 9780769521893</identifier><identifier>ISBN: 0769521894</identifier><identifier>DOI: 10.1109/ICMENS.2004.1509032</identifier><language>eng</language><publisher>IEEE</publisher><subject>Biomedical monitoring ; Capacitance ; Capacitive sensors ; Capacitors ; Condition monitoring ; Conductors ; Dielectrics ; Health and safety ; Mechanical factors ; Permittivity</subject><ispartof>2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004, p.656-658</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1509032$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,777,781,786,787,2052,4036,4037,27906,54901</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1509032$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Shavandi, M.</creatorcontrib><creatorcontrib>Moussa, W.A.</creatorcontrib><title>Investigation of a 3-D Capacitor Micro Strain Gauge for Applications in Biomedical and Industrial Health Monitoring</title><title>2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)</title><addtitle>ICMENS</addtitle><description>The behavior of a Capacitive Micro Strain Gauge, CMSG, consisting of two parallel plates embedded in a dielectric media, is investigated analytically and numerically. Of the particular interests to this study is the application of the Capacitive Micro Strain Gauge in on-a-chip systems for biomedical and industrial health monitoring. A combination of analytical and numerical approaches is presented to extract strain components from capacitance. The studies show that capacitance is affected by the size of dielectric. It is also explored to be a function of normal components of strain while shear components have no effect on capacitance. A suitable approach is presented to shift the actual capacitance to the theoretical capacitance.</description><subject>Biomedical monitoring</subject><subject>Capacitance</subject><subject>Capacitive sensors</subject><subject>Capacitors</subject><subject>Condition monitoring</subject><subject>Conductors</subject><subject>Dielectrics</subject><subject>Health and safety</subject><subject>Mechanical factors</subject><subject>Permittivity</subject><isbn>9780769521893</isbn><isbn>0769521894</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2004</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9T8tOwzAQtFQhUUG-oJf9gYZ1HjQ-llBoDuml3KtV4oStUjuyXST-HoN6Zi6jmdGMNEKsJKZSonpq6nZ3OKYZYpHKEhXm2UIkalPh5lmVmaxUfi8S788YUZQFVtVS-MZ8aR94pMDWgB2AIF-_Qk0zdRysg5Y7Z-EYHLGBd7qOGoZob-d54u6v5SEmL2wvuo_OBGR6aEx_9cFxlHtNU_iE1prfPTbjo7gbaPI6ufGDWL3tPur9mrXWp9nxhdz36XYh_z_9Ac9VS-s</recordid><startdate>2004</startdate><enddate>2004</enddate><creator>Shavandi, M.</creator><creator>Moussa, W.A.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2004</creationdate><title>Investigation of a 3-D Capacitor Micro Strain Gauge for Applications in Biomedical and Industrial Health Monitoring</title><author>Shavandi, M. ; Moussa, W.A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_15090323</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Biomedical monitoring</topic><topic>Capacitance</topic><topic>Capacitive sensors</topic><topic>Capacitors</topic><topic>Condition monitoring</topic><topic>Conductors</topic><topic>Dielectrics</topic><topic>Health and safety</topic><topic>Mechanical factors</topic><topic>Permittivity</topic><toplevel>online_resources</toplevel><creatorcontrib>Shavandi, M.</creatorcontrib><creatorcontrib>Moussa, W.A.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Shavandi, M.</au><au>Moussa, W.A.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Investigation of a 3-D Capacitor Micro Strain Gauge for Applications in Biomedical and Industrial Health Monitoring</atitle><btitle>2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)</btitle><stitle>ICMENS</stitle><date>2004</date><risdate>2004</risdate><spage>656</spage><epage>658</epage><pages>656-658</pages><isbn>9780769521893</isbn><isbn>0769521894</isbn><abstract>The behavior of a Capacitive Micro Strain Gauge, CMSG, consisting of two parallel plates embedded in a dielectric media, is investigated analytically and numerically. Of the particular interests to this study is the application of the Capacitive Micro Strain Gauge in on-a-chip systems for biomedical and industrial health monitoring. A combination of analytical and numerical approaches is presented to extract strain components from capacitance. The studies show that capacitance is affected by the size of dielectric. It is also explored to be a function of normal components of strain while shear components have no effect on capacitance. A suitable approach is presented to shift the actual capacitance to the theoretical capacitance.</abstract><pub>IEEE</pub><doi>10.1109/ICMENS.2004.1509032</doi></addata></record>
fulltext	fulltext_linktorsrc
identifier	ISBN: 9780769521893
ispartof	2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004, p.656-658
issn
language	eng
recordid	cdi_ieee_primary_1509032
source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Biomedical monitoring Capacitance Capacitive sensors Capacitors Condition monitoring Conductors Dielectrics Health and safety Mechanical factors Permittivity
title	Investigation of a 3-D Capacitor Micro Strain Gauge for Applications in Biomedical and Industrial Health Monitoring
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-18T07%3A23%3A52IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Investigation%20of%20a%203-D%20Capacitor%20Micro%20Strain%20Gauge%20for%20Applications%20in%20Biomedical%20and%20Industrial%20Health%20Monitoring&rft.btitle=2004%20International%20Conference%20on%20MEMS,%20NANO%20and%20Smart%20Systems%20(ICMENS'04)&rft.au=Shavandi,%20M.&rft.date=2004&rft.spage=656&rft.epage=658&rft.pages=656-658&rft.isbn=9780769521893&rft.isbn_list=0769521894&rft_id=info:doi/10.1109/ICMENS.2004.1509032&rft_dat=%3Cieee_6IE%3E1509032%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=1509032&rfr_iscdi=true