Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism

A fully differential square frame resonator (SFR), operating at resonant frequencies of 6.184MHz and 17.63MHz for the fundamental and 2/sup nd/ harmonic, respectively, is introduced, which is the highest resonant frequency reported to date in CMOS-MEMS technology. In-plane CMOS-MEMS resonators have...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chiung-Cheng Lo, Fang Chen, Fedder, G.K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Band pass filters CMOS technology Differential amplifiers Electrodes Electrothermal effects Hafnium Micromechanical devices Resonance Resonant frequency Voltage
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