First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row
We present a fully automated MEMS designed for the trim control of a microspotting system (so called "bioplume") using an integrated parallel force sensor with high precision and sensitivity. This MEMS improves the results, in terms of size and homogeneity of deposited droplets, through a...
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| creator | Belaubre, P. Pourciel, J.-B. Saya, D. Leichle, T. Mathieu, F. Nicu, L. Bergaud, C. |
| description | We present a fully automated MEMS designed for the trim control of a microspotting system (so called "bioplume") using an integrated parallel force sensor with high precision and sensitivity. This MEMS improves the results, in terms of size and homogeneity of deposited droplets, through a direct-contact method. It allows the contact time and the force to be controlled during deposition. Using this method, homogeneous spots can be realized leading to coherent analysis. The resolution of the sensor is approximately 0.6 V//spl mu/m with an uncertainty of 100 mV, which gives a trim angle error of 0.006/spl deg/. |
| doi_str_mv | 10.1109/SENSOR.2005.1496500 |
| format | Conference Proceeding |
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The resolution of the sensor is approximately 0.6 V//spl mu/m with an uncertainty of 100 mV, which gives a trim angle error of 0.006/spl deg/.</description><subject>Automatic control</subject><subject>Biomedical optical imaging</subject><subject>Control systems</subject><subject>Fabrication</subject><subject>Force control</subject><subject>Force sensors</subject><subject>Micromechanical devices</subject><subject>Optical sensors</subject><subject>Piezoresistance</subject><subject>Strain control</subject><issn>2159-547X</issn><isbn>0780389948</isbn><isbn>9780780389946</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2005</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotUM1KAzEYDKhgrX2CXr4X2PrtT3aTo5RWhWLBKngr2c0XjWybNcm21Lvv7YKdywzDMDDD2DTFWZqivNssnjfrl1mGyGdpIUuOeMFusBKYCykLcclGWcplwovq_ZpNQvjCAfkQlGLEfpfWhwghUgfRHZXXARSYvm1PoProdiqShujtDhq3j961YJyH1n73VoOmzgUbrdsP8mAbAhUhfhLsbONdaFRL0Ae7_4DO0o_zFGyI9kDQqH20LR3IB_DueMuujGoDTc48Zm_Lxev8MVmtH57m96vEphWPiVFCYCGwrhWWhotMoTBkygxrynhd6LzGwa3LRlSUojHY6ExrLmSZVZLyfMym_72WiLbdsEr50_b8Wv4HEdNltQ</recordid><startdate>2005</startdate><enddate>2005</enddate><creator>Belaubre, P.</creator><creator>Pourciel, J.-B.</creator><creator>Saya, D.</creator><creator>Leichle, T.</creator><creator>Mathieu, F.</creator><creator>Nicu, L.</creator><creator>Bergaud, C.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2005</creationdate><title>First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row</title><author>Belaubre, P. ; Pourciel, J.-B. ; Saya, D. ; Leichle, T. ; Mathieu, F. ; Nicu, L. ; Bergaud, C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-fa880480bba06f582a08fef620be25b4d3b0582b6c87e10ff0cd2dd5896279e33</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Automatic control</topic><topic>Biomedical optical imaging</topic><topic>Control systems</topic><topic>Fabrication</topic><topic>Force control</topic><topic>Force sensors</topic><topic>Micromechanical devices</topic><topic>Optical sensors</topic><topic>Piezoresistance</topic><topic>Strain control</topic><toplevel>online_resources</toplevel><creatorcontrib>Belaubre, P.</creatorcontrib><creatorcontrib>Pourciel, J.-B.</creatorcontrib><creatorcontrib>Saya, D.</creatorcontrib><creatorcontrib>Leichle, T.</creatorcontrib><creatorcontrib>Mathieu, F.</creatorcontrib><creatorcontrib>Nicu, L.</creatorcontrib><creatorcontrib>Bergaud, C.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Belaubre, P.</au><au>Pourciel, J.-B.</au><au>Saya, D.</au><au>Leichle, T.</au><au>Mathieu, F.</au><au>Nicu, L.</au><au>Bergaud, C.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row</atitle><btitle>The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05</btitle><stitle>SENSOR</stitle><date>2005</date><risdate>2005</risdate><volume>1</volume><spage>648</spage><epage>651 Vol. 1</epage><pages>648-651 Vol. 1</pages><issn>2159-547X</issn><isbn>0780389948</isbn><isbn>9780780389946</isbn><abstract>We present a fully automated MEMS designed for the trim control of a microspotting system (so called "bioplume") using an integrated parallel force sensor with high precision and sensitivity. This MEMS improves the results, in terms of size and homogeneity of deposited droplets, through a direct-contact method. It allows the contact time and the force to be controlled during deposition. Using this method, homogeneous spots can be realized leading to coherent analysis. The resolution of the sensor is approximately 0.6 V//spl mu/m with an uncertainty of 100 mV, which gives a trim angle error of 0.006/spl deg/.</abstract><pub>IEEE</pub><doi>10.1109/SENSOR.2005.1496500</doi></addata></record> |
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| ispartof | The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, Vol.1, p.648-651 Vol. 1 |
| issn | 2159-547X |
| language | eng |
| recordid | cdi_ieee_primary_1496500 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Automatic control Biomedical optical imaging Control systems Fabrication Force control Force sensors Micromechanical devices Optical sensors Piezoresistance Strain control |
| title | First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row |
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