Single element excitation and detection of (micro-)mechanical resonators
The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanica...
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| creator | Tilmans, H.A.C. IJntema, D.J. Fluitman, J.H.J. |
| description | The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90 degrees in the transfer characteristic around resonance is required.< > |
| doi_str_mv | 10.1109/SENSOR.1991.148931 |
| format | Conference Proceeding |
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An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. 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Digest of Technical Papers</title><addtitle>SENSOR</addtitle><description>The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90 degrees in the transfer characteristic around resonance is required.< ></description><subject>Actuators</subject><subject>Bridge circuits</subject><subject>Circuit simulation</subject><subject>Frequency</subject><subject>Mechanical sensors</subject><subject>Motion detection</subject><subject>Resonance</subject><subject>Sensor phenomena and characterization</subject><subject>Shape</subject><subject>Vibrations</subject><isbn>9780879425852</isbn><isbn>0879425857</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1991</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj7FOwzAURS0hJFDJD3TyCEPCe7Gd2COqCkWqqERgrlz7GYwSB8UZ4O-paO9ydZarcxlbIlSIYO679Uu3e63QGKxQaiPwghWm1aBbI2ulVX3Fipy_4BipoAW8Zpsupo-eOPU0UJo5_bg42zmOidvkuaeZ3D-Ngd8O0U1jeTeQ-7QpOtvzifKY7DxO-YZdBttnKs69YO-P67fVptzunp5XD9vSoQYs0YJvGomavFekhFIShdW1Awg1iYAHapqjugzoPBDq1iqFRrqDCUY2KBZsedqNRLT_nuJgp9_96a74A1KNSs0</recordid><startdate>1991</startdate><enddate>1991</enddate><creator>Tilmans, H.A.C.</creator><creator>IJntema, D.J.</creator><creator>Fluitman, J.H.J.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1991</creationdate><title>Single element excitation and detection of (micro-)mechanical resonators</title><author>Tilmans, H.A.C. ; IJntema, D.J. ; Fluitman, J.H.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1801-1a0d66418edd5e5355413a82c00f2e3f1be668934f1cd0e187a55194cb9f94613</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1991</creationdate><topic>Actuators</topic><topic>Bridge circuits</topic><topic>Circuit simulation</topic><topic>Frequency</topic><topic>Mechanical sensors</topic><topic>Motion detection</topic><topic>Resonance</topic><topic>Sensor phenomena and characterization</topic><topic>Shape</topic><topic>Vibrations</topic><toplevel>online_resources</toplevel><creatorcontrib>Tilmans, H.A.C.</creatorcontrib><creatorcontrib>IJntema, D.J.</creatorcontrib><creatorcontrib>Fluitman, J.H.J.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Tilmans, H.A.C.</au><au>IJntema, D.J.</au><au>Fluitman, J.H.J.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Single element excitation and detection of (micro-)mechanical resonators</atitle><btitle>TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. 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A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90 degrees in the transfer characteristic around resonance is required.< ></abstract><pub>IEEE</pub><doi>10.1109/SENSOR.1991.148931</doi><tpages>5</tpages><oa>free_for_read</oa></addata></record> |
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| identifier | ISBN: 9780879425852 |
| ispartof | TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 1991, p.533-537 |
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| language | eng |
| recordid | cdi_ieee_primary_148931 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Actuators Bridge circuits Circuit simulation Frequency Mechanical sensors Motion detection Resonance Sensor phenomena and characterization Shape Vibrations |
| title | Single element excitation and detection of (micro-)mechanical resonators |
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