Yield and efficiency optimization through improved control of surface oxide during string ribbon growth

To minimize production costs and maximize yields, Evergreen Solar has developed a "no-etch" process sequence in which wafers move directly from string ribbon growth to diffusion with no intermediate processing. In this process sequence, the surface oxide thickness d/sub ox/ can affect the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Clark-Phelps, R.B., Wallace, R.L., Gabor, A.M., Harvey, D.S., Cretella, M.C., Hanoka, J.I.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Costs Diffusion processes Electrical resistance measurement Furnaces Measurement standards Production Strontium Surface resistance Thickness control Thickness measurement
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