The application of ion implantation to specific device structures

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Veröffentlicht in:	IEEE transactions on electron devices 1968-09, Vol.15 (9), p.687-687
Hauptverfasser:	Brook, P., Hambleton, K.G., Large, L.N., Raines, J.A., Whitehead, C.S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystals Electric fields Gallium arsenide Ion implantation Laboratories Laser beams Vectors
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doi_str_mv	10.1109/T-ED.1968.16435
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ispartof	IEEE transactions on electron devices, 1968-09, Vol.15 (9), p.687-687
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language	eng
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source	IEEE Electronic Library (IEL)
subjects	Crystals Electric fields Gallium arsenide Ion implantation Laboratories Laser beams Vectors
title	The application of ion implantation to specific device structures
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