Dual stress liner enhancement in hybrid orientation technology

Hybrid orientation technology (HOT) has been successfully integrated with a dual stress liner (DSL) process to demonstrate outstanding PFET device characteristics in epitaxially grown [110] bulk silicon. Stress induced by the nitride MOL liners results in mobility enhancement that depends on the des...

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Bibliographische Detailangaben

Hauptverfasser:	Sheraw, C.D., Yang, M., Fried, D.M., Costrini, G., Kanarsky, T., Lee, W.-H., Chan, V., Fischetti, M.V., Holt, J., Black, L., Naeem, M., Panda, S., Economikos, L., Groschopf, J., Kapur, A., Li, Y., Mo, R.T., Bonnoit, A., Degraw, D., Luning, S., Chidambarrao, D., Wang, X., Bryant, A., Brown, D., Sung, C.-Y., Agnello, P., Ieong, M., Huang, S.-F., Chen, X., Khare, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Compressive stress DSL Etching Fabrication Hybrid junctions Implants Research and development Ring oscillators Silicon Tungsten
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