Application of breakthrough failure analysis techniques on 90nm devices with an EOS fail

In this investigation, a combination of old and new FA techniques has been utilized in the analysis of EOS failure in 90nm devices. We illustrate how information from conventional techniques and new innovative techniques can lead to successful root cause analysis of the failure mechanism. One of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bailon, M.F., Salinas, P.F., Arboleda, J.S., Miranda, J.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Circuit simulation Earth Observing System Failure analysis Information analysis Infrared spectra Integrated circuit technology Java Photoelectricity Signal analysis Spectral analysis
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