Bubble jet printhead with integrated polyimide nozzle plate
This paper reports for the first time on a new 1/3 inch thermal bubble jet printhead with integrated nozzle plate. The printhead is a combination of a standard printhead substrate with a new three-dimensional structured polyimide nozzle plate avoiding a three layer assembly known from other commerci...
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| creator | Lindemann, T. Ashauer, H. Goettsche, T. Sandmaier, H. Yu, Y. Peters, R.P. Sassano, D. Bellone, A. Scardovi, A. Zengerle, R. Koltay, P. |
| description | This paper reports for the first time on a new 1/3 inch thermal bubble jet printhead with integrated nozzle plate. The printhead is a combination of a standard printhead substrate with a new three-dimensional structured polyimide nozzle plate avoiding a three layer assembly known from other commercial printheads. The 50 /spl mu/m thick nozzle plate contains the fluidic channels and 208 nozzles with minimum lateral dimensions of 10 /spl mu/m. The misalignment of the two laser structured layers has proved to be less than 1 /spl mu/m. The nozzle plate is assembled with the substrate using a 3 /spl mu/m adhesive layer with an alignment accuracy of 3 /spl mu/m. The integrated nozzle plate leads to a better control of the printhead geometry and saves one processing step in production. Fully three dimensional computational fluid dynamics (CFD) simulations have been performed to investigate the effect of misalignments, the thickness of the adhesive layer and heater geometry. The agreement between simulation and experiment is better than 5%. |
| doi_str_mv | 10.1109/MEMSYS.2005.1453991 |
| format | Conference Proceeding |
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The printhead is a combination of a standard printhead substrate with a new three-dimensional structured polyimide nozzle plate avoiding a three layer assembly known from other commercial printheads. The 50 /spl mu/m thick nozzle plate contains the fluidic channels and 208 nozzles with minimum lateral dimensions of 10 /spl mu/m. The misalignment of the two laser structured layers has proved to be less than 1 /spl mu/m. The nozzle plate is assembled with the substrate using a 3 /spl mu/m adhesive layer with an alignment accuracy of 3 /spl mu/m. The integrated nozzle plate leads to a better control of the printhead geometry and saves one processing step in production. Fully three dimensional computational fluid dynamics (CFD) simulations have been performed to investigate the effect of misalignments, the thickness of the adhesive layer and heater geometry. The agreement between simulation and experiment is better than 5%.</description><identifier>ISSN: 1084-6999</identifier><identifier>ISBN: 9780780387324</identifier><identifier>ISBN: 0780387325</identifier><identifier>DOI: 10.1109/MEMSYS.2005.1453991</identifier><language>eng</language><publisher>IEEE</publisher><subject>Assembly ; Computational fluid dynamics ; Computational modeling ; Frequency ; Geometrical optics ; Laboratories ; Laser ablation ; Micromechanical devices ; Optical design ; Polyimides</subject><ispartof>18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. 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Fully three dimensional computational fluid dynamics (CFD) simulations have been performed to investigate the effect of misalignments, the thickness of the adhesive layer and heater geometry. The agreement between simulation and experiment is better than 5%.</description><subject>Assembly</subject><subject>Computational fluid dynamics</subject><subject>Computational modeling</subject><subject>Frequency</subject><subject>Geometrical optics</subject><subject>Laboratories</subject><subject>Laser ablation</subject><subject>Micromechanical devices</subject><subject>Optical design</subject><subject>Polyimides</subject><issn>1084-6999</issn><isbn>9780780387324</isbn><isbn>0780387325</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2005</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotT8tqwzAQFLSFhtRfkIt-wO7K0koWPbUhfUBCD2kPPQXZWjcKTmJslZJ8fQXNsLDMzjDsMDYTUAgB9n61WK2_1kUJgIVQKK0VVyyzpoI0sjKyVNdsIqBSubbW3rJsHHeQIC0m-4Q9PP3UdUd8R5H3QzjELTnPf0Pc8kToe3CRPO-P3Snsgyd-OJ7Pyd536X7HblrXjZRd9pR9Pi8-5q_58v3lbf64zIMwGHMUqqlbj7JSWjrllCyNUdLU4HTpsFGgXdU0hmzpRWs0AoLBFkTTEiZZTtnsPzcQ0SZ9uXfDaXOpK_8AqeFI0A</recordid><startdate>2005</startdate><enddate>2005</enddate><creator>Lindemann, T.</creator><creator>Ashauer, H.</creator><creator>Goettsche, T.</creator><creator>Sandmaier, H.</creator><creator>Yu, Y.</creator><creator>Peters, R.P.</creator><creator>Sassano, D.</creator><creator>Bellone, A.</creator><creator>Scardovi, A.</creator><creator>Zengerle, R.</creator><creator>Koltay, P.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2005</creationdate><title>Bubble jet printhead with integrated polyimide nozzle plate</title><author>Lindemann, T. ; Ashauer, H. ; Goettsche, T. ; Sandmaier, H. ; Yu, Y. ; Peters, R.P. ; Sassano, D. ; Bellone, A. ; Scardovi, A. ; Zengerle, R. ; Koltay, P.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-514cbfd538463a4a43277437b0a62a5c406a8cc7e92d1f76505075f01cfe55c43</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Assembly</topic><topic>Computational fluid dynamics</topic><topic>Computational modeling</topic><topic>Frequency</topic><topic>Geometrical optics</topic><topic>Laboratories</topic><topic>Laser ablation</topic><topic>Micromechanical devices</topic><topic>Optical design</topic><topic>Polyimides</topic><toplevel>online_resources</toplevel><creatorcontrib>Lindemann, T.</creatorcontrib><creatorcontrib>Ashauer, H.</creatorcontrib><creatorcontrib>Goettsche, T.</creatorcontrib><creatorcontrib>Sandmaier, H.</creatorcontrib><creatorcontrib>Yu, Y.</creatorcontrib><creatorcontrib>Peters, R.P.</creatorcontrib><creatorcontrib>Sassano, D.</creatorcontrib><creatorcontrib>Bellone, A.</creatorcontrib><creatorcontrib>Scardovi, A.</creatorcontrib><creatorcontrib>Zengerle, R.</creatorcontrib><creatorcontrib>Koltay, P.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Lindemann, T.</au><au>Ashauer, H.</au><au>Goettsche, T.</au><au>Sandmaier, H.</au><au>Yu, Y.</au><au>Peters, R.P.</au><au>Sassano, D.</au><au>Bellone, A.</au><au>Scardovi, A.</au><au>Zengerle, R.</au><au>Koltay, P.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Bubble jet printhead with integrated polyimide nozzle plate</atitle><btitle>18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005</btitle><stitle>MEMSYS</stitle><date>2005</date><risdate>2005</risdate><spage>560</spage><epage>563</epage><pages>560-563</pages><issn>1084-6999</issn><isbn>9780780387324</isbn><isbn>0780387325</isbn><abstract>This paper reports for the first time on a new 1/3 inch thermal bubble jet printhead with integrated nozzle plate. The printhead is a combination of a standard printhead substrate with a new three-dimensional structured polyimide nozzle plate avoiding a three layer assembly known from other commercial printheads. The 50 /spl mu/m thick nozzle plate contains the fluidic channels and 208 nozzles with minimum lateral dimensions of 10 /spl mu/m. The misalignment of the two laser structured layers has proved to be less than 1 /spl mu/m. The nozzle plate is assembled with the substrate using a 3 /spl mu/m adhesive layer with an alignment accuracy of 3 /spl mu/m. The integrated nozzle plate leads to a better control of the printhead geometry and saves one processing step in production. Fully three dimensional computational fluid dynamics (CFD) simulations have been performed to investigate the effect of misalignments, the thickness of the adhesive layer and heater geometry. The agreement between simulation and experiment is better than 5%.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.2005.1453991</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 1084-6999 |
| ispartof | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, 2005, p.560-563 |
| issn | 1084-6999 |
| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Assembly Computational fluid dynamics Computational modeling Frequency Geometrical optics Laboratories Laser ablation Micromechanical devices Optical design Polyimides |
| title | Bubble jet printhead with integrated polyimide nozzle plate |
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