Integrated nitride cantilever array with Si heaters and piezoelectric detectors for nano-data-storage application

In this paper, a silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM (scanning probe microscopy) -based data st...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hyo-Jin Nam, Young-Sik Kim, Sunyong Lee, C., Won-Hyeog Jin, Seong Soo Jang, Il-Joo Cho, Jong-Uk Bu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Detectors Energy consumption Mechanical sensors Memory Piezoelectric films Polymers Probes Sensor arrays Silicon Thermal sensors
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