Integrated circuits incorporating thin-film active and passive elements

The thin-film field-effect transistor (TFT) provides the active element for complex integrated circuits deposited upon an insulating substrate. N-type transistors are obtained with evaporated layers of cadmium sulfide or selenide and p-type transistors with evaporated tellurium. Switching speeds of...

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Bibliographische Detailangaben

Veröffentlicht in:	Proceedings of the IEEE 1964-01, Vol.52 (12), p.1479-1486
Hauptverfasser:	Weimer, P.K., Borkan, H., Sadasiv, G., Meray-Horvath, L., Shallcross, F.V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cadmium compounds Circuit stability FETs Frequency Insulation Sputtering Substrates Tellurium Thin film circuits Thin film transistors
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