Exploring the limits of low cost, organics-compatible high-k ceramic thin films for embedded decoupling applications

This paper presents four organic-compatible thin film processing techniques for embedding capacitors into organic PWBs. Hydrothermal synthesis allows integration of pure nano-grained barium titanate films with capacitance density of about 1 /spl mu/F/cm/sup 2/. Sol-gel and RF-sputtering in conjuncti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Balaraman, D., Raj, P.M., Abothu, R., Bhattacharya, S., Sacks, M., Lance, M., Meyer, H., Swaminathan, M., Tumrnala, R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Barium Capacitance Capacitors Ceramics Costs Dielectric thin films High K dielectric materials High-K gate dielectrics Titanium compounds Transistors
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