New selective anodization process for Nb Josephson junction with AlO/sub x/ barrier

One of the most important factor of the superconducting tunnel junction for a particle and radiation detection is the sub-gap leakage current. An anodization of a junction edge is an effective method to reduce the sub-gap leakage current. In a new fabrication process of a Nb/Al-AlO/sub x/-Al/Nb junc...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2005-06, Vol.15 (2), p.98-101
Hauptverfasser:	Morohashi, S., Ikuta, M., Miyoshi, T., Matsumoto, D., Ariyoshi, S., Ukibe, M., Ohkubo, M., Matsuo, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Anodization detector Fabrication facing target sputtering Josephson junctions Leakage current Nb/Al-AlOx-Al/Nb junction Niobium Plasma accelerators Plasma applications Plasma confinement Radiation detectors Sputter etching Sputtering
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