On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method

The possibilities of using a microwave gas spectroscopy method for the investigation of impurities of silanes are considered in this paper. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found.

Bibliographische Detailangaben

Hauptverfasser:	Vaks, V.L., Chernyaeva, M.B., Klyueva, N.V., Domracheva, E.G., Sennikov, P.G., Chuprov, L.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Electromagnetic wave absorption Frequency estimation Frequency measurement Impurities Information analysis Material properties Microwave measurements Microwave theory and techniques Phase measurement Spectroscopy
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