On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method
The possibilities of using a microwave gas spectroscopy method for the investigation of impurities of silanes are considered in this paper. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found.
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| creator | Vaks, V.L. Chernyaeva, M.B. Klyueva, N.V. Domracheva, E.G. Sennikov, P.G. Chuprov, L.A. |
| description | The possibilities of using a microwave gas spectroscopy method for the investigation of impurities of silanes are considered in this paper. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found. |
| doi_str_mv | 10.1109/ICIMW.2004.1422121 |
| format | Conference Proceeding |
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The absorption lines of known impurities at 2-mm wavelength range are analyzed. 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The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found.</abstract><pub>IEEE</pub><doi>10.1109/ICIMW.2004.1422121</doi><tpages>2</tpages></addata></record> |
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| identifier | ISBN: 0780384903 |
| ispartof | Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004, 2004, p.381-382 |
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| language | eng |
| recordid | cdi_ieee_primary_1422121 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Electromagnetic wave absorption Frequency estimation Frequency measurement Impurities Information analysis Material properties Microwave measurements Microwave theory and techniques Phase measurement Spectroscopy |
| title | On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method |
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