A new approach to RF thin film microinductors

A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilay...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Froramberger, M., Tewes, M., McCord, J., Hartung, W., Loschand, R., Quandt, E.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Inductors Magnetic anisotropy Magnetic cores Magnetic flux Magnetic materials Perpendicular magnetic anisotropy Q factor Radio frequency Toroidal magnetic fields Transistors
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