A new approach to RF thin film microinductors
A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilay...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 1364 |
---|---|
container_issue | |
container_start_page | 1361 |
container_title | |
container_volume | 3 |
creator | Froramberger, M. Tewes, M. McCord, J. Hartung, W. Loschand, R. Quandt, E. |
description | A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilayer way to realize a crossed magnetic anisotropy in the core. High frequency measurements illustrate the advantages of the unique magnetic geometry. The influence and benefits of such a magnetic core on microinductors will he discused in detail. The results show, that such crossed anisotropy microinductors are very promising alternative to common planar spiral inductors in the RF range. |
format | Conference Proceeding |
fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_1411267</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1411267</ieee_id><sourcerecordid>1411267</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-364ae50a4a7f0c883d6b65b63df970eeec25544bcc0964382ec8c3d4b9a3bbb23</originalsourceid><addsrcrecordid>eNotjMtqAjEUQANS0Kpf4CY_MJDk5maSpYgvEAqlriW5k8GI8yAzpfj3FfRszuZwJuxTohUIzikxZcthuIkn4BCVnrFizdv4x33f587TlY8d_97x8ZpaXqd7w5tEuUtt9Utjl4cF-6j9fYjLt-fsvNv-bA7F6Wt_3KxPRZIljgUY7SMKr31ZC7IWKhMMBgNV7UoRYySFqHUgEs5osCqSJah0cB5CCArmbPX6pmd86XNqfH5cpJZSmRL-AdNOOyU</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>A new approach to RF thin film microinductors</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Froramberger, M. ; Tewes, M. ; McCord, J. ; Hartung, W. ; Loschand, R. ; Quandt, E.</creator><creatorcontrib>Froramberger, M. ; Tewes, M. ; McCord, J. ; Hartung, W. ; Loschand, R. ; Quandt, E.</creatorcontrib><description>A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilayer way to realize a crossed magnetic anisotropy in the core. High frequency measurements illustrate the advantages of the unique magnetic geometry. The influence and benefits of such a magnetic core on microinductors will he discused in detail. The results show, that such crossed anisotropy microinductors are very promising alternative to common planar spiral inductors in the RF range.</description><identifier>ISBN: 1580539920</identifier><identifier>ISBN: 9781580539920</identifier><language>eng</language><publisher>IEEE</publisher><subject>Inductors ; Magnetic anisotropy ; Magnetic cores ; Magnetic flux ; Magnetic materials ; Perpendicular magnetic anisotropy ; Q factor ; Radio frequency ; Toroidal magnetic fields ; Transistors</subject><ispartof>34th European Microwave Conference, 2004, 2004, Vol.3, p.1361-1364</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1411267$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,4035,4036,54899</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1411267$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Froramberger, M.</creatorcontrib><creatorcontrib>Tewes, M.</creatorcontrib><creatorcontrib>McCord, J.</creatorcontrib><creatorcontrib>Hartung, W.</creatorcontrib><creatorcontrib>Loschand, R.</creatorcontrib><creatorcontrib>Quandt, E.</creatorcontrib><title>A new approach to RF thin film microinductors</title><title>34th European Microwave Conference, 2004</title><addtitle>EUMC</addtitle><description>A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilayer way to realize a crossed magnetic anisotropy in the core. High frequency measurements illustrate the advantages of the unique magnetic geometry. The influence and benefits of such a magnetic core on microinductors will he discused in detail. The results show, that such crossed anisotropy microinductors are very promising alternative to common planar spiral inductors in the RF range.</description><subject>Inductors</subject><subject>Magnetic anisotropy</subject><subject>Magnetic cores</subject><subject>Magnetic flux</subject><subject>Magnetic materials</subject><subject>Perpendicular magnetic anisotropy</subject><subject>Q factor</subject><subject>Radio frequency</subject><subject>Toroidal magnetic fields</subject><subject>Transistors</subject><isbn>1580539920</isbn><isbn>9781580539920</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2004</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotjMtqAjEUQANS0Kpf4CY_MJDk5maSpYgvEAqlriW5k8GI8yAzpfj3FfRszuZwJuxTohUIzikxZcthuIkn4BCVnrFizdv4x33f587TlY8d_97x8ZpaXqd7w5tEuUtt9Utjl4cF-6j9fYjLt-fsvNv-bA7F6Wt_3KxPRZIljgUY7SMKr31ZC7IWKhMMBgNV7UoRYySFqHUgEs5osCqSJah0cB5CCArmbPX6pmd86XNqfH5cpJZSmRL-AdNOOyU</recordid><startdate>2004</startdate><enddate>2004</enddate><creator>Froramberger, M.</creator><creator>Tewes, M.</creator><creator>McCord, J.</creator><creator>Hartung, W.</creator><creator>Loschand, R.</creator><creator>Quandt, E.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2004</creationdate><title>A new approach to RF thin film microinductors</title><author>Froramberger, M. ; Tewes, M. ; McCord, J. ; Hartung, W. ; Loschand, R. ; Quandt, E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-364ae50a4a7f0c883d6b65b63df970eeec25544bcc0964382ec8c3d4b9a3bbb23</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Inductors</topic><topic>Magnetic anisotropy</topic><topic>Magnetic cores</topic><topic>Magnetic flux</topic><topic>Magnetic materials</topic><topic>Perpendicular magnetic anisotropy</topic><topic>Q factor</topic><topic>Radio frequency</topic><topic>Toroidal magnetic fields</topic><topic>Transistors</topic><toplevel>online_resources</toplevel><creatorcontrib>Froramberger, M.</creatorcontrib><creatorcontrib>Tewes, M.</creatorcontrib><creatorcontrib>McCord, J.</creatorcontrib><creatorcontrib>Hartung, W.</creatorcontrib><creatorcontrib>Loschand, R.</creatorcontrib><creatorcontrib>Quandt, E.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Froramberger, M.</au><au>Tewes, M.</au><au>McCord, J.</au><au>Hartung, W.</au><au>Loschand, R.</au><au>Quandt, E.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A new approach to RF thin film microinductors</atitle><btitle>34th European Microwave Conference, 2004</btitle><stitle>EUMC</stitle><date>2004</date><risdate>2004</risdate><volume>3</volume><spage>1361</spage><epage>1364</epage><pages>1361-1364</pages><isbn>1580539920</isbn><isbn>9781580539920</isbn><abstract>A new approach to RF thin film inductors has been investigated. A toroid inductor design was realized in thin film technology. An operating frequency in the range from 100MHz to 3 GHz was targeted. Softmagnetic FeCoBSi was used as cure material. The magnetic film were sputter deposited in a multilayer way to realize a crossed magnetic anisotropy in the core. High frequency measurements illustrate the advantages of the unique magnetic geometry. The influence and benefits of such a magnetic core on microinductors will he discused in detail. The results show, that such crossed anisotropy microinductors are very promising alternative to common planar spiral inductors in the RF range.</abstract><pub>IEEE</pub><tpages>4</tpages></addata></record> |
fulltext | fulltext_linktorsrc |
identifier | ISBN: 1580539920 |
ispartof | 34th European Microwave Conference, 2004, 2004, Vol.3, p.1361-1364 |
issn | |
language | eng |
recordid | cdi_ieee_primary_1411267 |
source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Inductors Magnetic anisotropy Magnetic cores Magnetic flux Magnetic materials Perpendicular magnetic anisotropy Q factor Radio frequency Toroidal magnetic fields Transistors |
title | A new approach to RF thin film microinductors |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-21T14%3A18%3A24IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=A%20new%20approach%20to%20RF%20thin%20film%20microinductors&rft.btitle=34th%20European%20Microwave%20Conference,%202004&rft.au=Froramberger,%20M.&rft.date=2004&rft.volume=3&rft.spage=1361&rft.epage=1364&rft.pages=1361-1364&rft.isbn=1580539920&rft.isbn_list=9781580539920&rft_id=info:doi/&rft_dat=%3Cieee_6IE%3E1411267%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=1411267&rfr_iscdi=true |