Fabrication of polymeric optical waveguides
The paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides have been fabricated from the organic polymer B-staged bisbenzocyclobutene (BCB) from Dow Chemical. A low cost fabrication method, chemical etching, is used to form the waveg...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | The paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides have been fabricated from the organic polymer B-staged bisbenzocyclobutene (BCB) from Dow Chemical. A low cost fabrication method, chemical etching, is used to form the waveguides on BK-7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides have been thoroughly investigated and are presented. |
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DOI: | 10.1109/RFM.2004.1411122 |