A novel positive-tone and aqueous-base-developable photosensitive benzocyclobutene-based material for microelectronics
This work describes a positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material. The polymer is made from divinylsiloxane bis(benzocyclobutene) and BCB-acrylic acid. A diazonap-thoquinone in the formulation makes it photosensitive. Patterned films have high resoluti...
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| creator | Ying-Hung So Stark, E. Thurston, S. Stokich, T. Yongfu Li Achen, A. Hetzner, J. Jang-Hi Im Curphy, J. Gavit, G. Beach, E. Folkenroth, J. Chakrabarti, A. Hawn, D. Mecca, S. de Biaugue, C.C. |
| description | This work describes a positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material. The polymer is made from divinylsiloxane bis(benzocyclobutene) and BCB-acrylic acid. A diazonap-thoquinone in the formulation makes it photosensitive. Patterned films have high resolution, and via openings are scum-free without a de-scum operation. The material possesses optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, including as a planarization layer or an insulation layer in display, and in packaging. |
| doi_str_mv | 10.1109/EPTC.2004.1396654 |
| format | Conference Proceeding |
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The material possesses optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, including as a planarization layer or an insulation layer in display, and in packaging.</description><subject>Dielectric materials</subject><subject>Dielectrics and electrical insulation</subject><subject>Displays</subject><subject>Mechanical factors</subject><subject>Microelectronics</subject><subject>Optical films</subject><subject>Optical materials</subject><subject>Optical polymers</subject><subject>Packaging</subject><subject>Planarization</subject><isbn>9780780388215</isbn><isbn>0780388216</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2004</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotUEtrwzAYM4zBRtcfMHbxH0jnV-L4WEL3gMJ2yL348Zl5JHYWu4Xu1y-sFQIhkHQQQo-UbCgl6nn32XcbRojYUK6aphY3aK1kSxbytmW0vkPrnL_JAq5EU6t7dNrimE4w4CnlUMIJqpIiYB0d1j9HSMdcGZ2hcrCE0qTNAHj6SiVliJcCNhB_kz3bIZljgQj_BYdHXWAOesA-zXgMdk4wgC1zisHmB3Tr9ZBhfdUV6l92ffdW7T9e37vtvgqKlEq0gtSOS-2JBMMappizxBHKbc1cvVhCjbJSWissNQ31S0hSL5j3ktqWr9DTZTYAwGGaw6jn8-F6Dv8DmltdmA</recordid><startdate>2004</startdate><enddate>2004</enddate><creator>Ying-Hung So</creator><creator>Stark, E.</creator><creator>Thurston, S.</creator><creator>Stokich, T.</creator><creator>Yongfu Li</creator><creator>Achen, A.</creator><creator>Hetzner, J.</creator><creator>Jang-Hi Im</creator><creator>Curphy, J.</creator><creator>Gavit, G.</creator><creator>Beach, E.</creator><creator>Folkenroth, J.</creator><creator>Chakrabarti, A.</creator><creator>Hawn, D.</creator><creator>Mecca, S.</creator><creator>de Biaugue, C.C.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2004</creationdate><title>A novel positive-tone and aqueous-base-developable photosensitive benzocyclobutene-based material for microelectronics</title><author>Ying-Hung So ; Stark, E. ; Thurston, S. ; Stokich, T. ; Yongfu Li ; Achen, A. ; Hetzner, J. ; Jang-Hi Im ; Curphy, J. ; Gavit, G. ; Beach, E. ; Folkenroth, J. ; Chakrabarti, A. ; Hawn, D. ; Mecca, S. ; de Biaugue, C.C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-48405d37af07eb26292dc0d013c52d529201b9c77cc4c1b61fb2671f42ff71c83</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Dielectric materials</topic><topic>Dielectrics and electrical insulation</topic><topic>Displays</topic><topic>Mechanical factors</topic><topic>Microelectronics</topic><topic>Optical films</topic><topic>Optical materials</topic><topic>Optical polymers</topic><topic>Packaging</topic><topic>Planarization</topic><toplevel>online_resources</toplevel><creatorcontrib>Ying-Hung So</creatorcontrib><creatorcontrib>Stark, E.</creatorcontrib><creatorcontrib>Thurston, S.</creatorcontrib><creatorcontrib>Stokich, T.</creatorcontrib><creatorcontrib>Yongfu Li</creatorcontrib><creatorcontrib>Achen, A.</creatorcontrib><creatorcontrib>Hetzner, J.</creatorcontrib><creatorcontrib>Jang-Hi Im</creatorcontrib><creatorcontrib>Curphy, J.</creatorcontrib><creatorcontrib>Gavit, G.</creatorcontrib><creatorcontrib>Beach, E.</creatorcontrib><creatorcontrib>Folkenroth, J.</creatorcontrib><creatorcontrib>Chakrabarti, A.</creatorcontrib><creatorcontrib>Hawn, D.</creatorcontrib><creatorcontrib>Mecca, S.</creatorcontrib><creatorcontrib>de Biaugue, C.C.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ying-Hung So</au><au>Stark, E.</au><au>Thurston, S.</au><au>Stokich, T.</au><au>Yongfu Li</au><au>Achen, A.</au><au>Hetzner, J.</au><au>Jang-Hi Im</au><au>Curphy, J.</au><au>Gavit, G.</au><au>Beach, E.</au><au>Folkenroth, J.</au><au>Chakrabarti, A.</au><au>Hawn, D.</au><au>Mecca, S.</au><au>de Biaugue, C.C.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A novel positive-tone and aqueous-base-developable photosensitive benzocyclobutene-based material for microelectronics</atitle><btitle>Proceedings of 6th Electronics Packaging Technology Conference (EPTC 2004) (IEEE Cat. No.04EX971)</btitle><stitle>EPTC</stitle><date>2004</date><risdate>2004</risdate><spage>473</spage><epage>478</epage><pages>473-478</pages><isbn>9780780388215</isbn><isbn>0780388216</isbn><abstract>This work describes a positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material. The polymer is made from divinylsiloxane bis(benzocyclobutene) and BCB-acrylic acid. A diazonap-thoquinone in the formulation makes it photosensitive. Patterned films have high resolution, and via openings are scum-free without a de-scum operation. The material possesses optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, including as a planarization layer or an insulation layer in display, and in packaging.</abstract><pub>IEEE</pub><doi>10.1109/EPTC.2004.1396654</doi><tpages>6</tpages></addata></record> |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Dielectric materials Dielectrics and electrical insulation Displays Mechanical factors Microelectronics Optical films Optical materials Optical polymers Packaging Planarization |
| title | A novel positive-tone and aqueous-base-developable photosensitive benzocyclobutene-based material for microelectronics |
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