ESCA-thickness metrology and head-medium spacing impact of disk lubricant

Electron spectroscopy for chemical analysis (ESCA) has been commonly used as a metrology tool for lubricant film-thickness measurement on magnetic hard disks. The accuracy of the ESCA-thickness measurement rests solely with the calibration accuracy of the characteristic photoelectron attenuation len...

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Veröffentlicht in:	IEEE transactions on magnetics 2005-02, Vol.41 (2), p.621-625
Hauptverfasser:	Huan Tang, Xiaoding Ma, Barth, G., Jianwei Liu, Stirniman, M., Jing Gui
Format:	Artikel
Sprache:	eng
Schlagworte:	Attenuation Attenuation length Attenuation measurement Calibration Chemical analysis Cross-disciplinary physics: materials science rheology Derivatives Disks Electrons ESCA Exact sciences and technology Hard disks head-medium separation Length measurement Lubricant films Lubricants Magnetic films Magnetism Materials science Metrology Other topics in materials science perfluoropolyethers (PFPE) lubricant Photoelectrons Physics Spectroscopy
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