Zirconium tungstate (ZrW/sub 2/O/sub 8/)-based micromachined negative thermal-expansion thin films

Negative expansion materials are relatively rare but promise to be particularly useful in designing thermally sensitive mechanical devices. Although negative thermal expansion (NTE) in bulk materials such as ZrW/sub 2/O/sub 8/ has been extensively studied, this paper reports the first deposition of...

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Veröffentlicht in:	Journal of microelectromechanical systems 2004-08, Vol.13 (4), p.688-695
Hauptverfasser:	Sutton, M.S., Talghader, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystals Electron beams Optical materials R&D Research & development Sputtering Temperature distribution Thermal expansion Thermal factors Thin film devices Thin films Transistors Zirconium
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