Modeling and measurements of MEMS gyroscopes

Advances in MEMS inertial sensors, such as gyroscopes, require the use of computational modeling and simulation with physical measurements. We believe that successful combination of computer aided design (CAD) and multiphysics simulation tools with the state-of-the-art (SOTA) measurement methodology...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Pryputniewicz, R.J., Xiangguang Tan, Przekwas, A.J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Application software Applied sciences Circuit properties Computational modeling Computer simulation Costs Design automation Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Gyroscopes Integrated optoelectronics. Optoelectronic circuits Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices Military computing Optical and optoelectronic circuits Optoelectronic devices Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Software prototyping Virtual prototyping
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