The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator
A hierarchical and mixed-domain design approach is implemented within the Cadence/sup /spl reg// simulation framework and applied to an integrated MEMS-CMOS oscillator. Parameters concerning both the electronic circuit description at transistor level and the MEMS structure defined by its topology an...
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| description | A hierarchical and mixed-domain design approach is implemented within the Cadence/sup /spl reg// simulation framework and applied to an integrated MEMS-CMOS oscillator. Parameters concerning both the electronic circuit description at transistor level and the MEMS structure defined by its topology and dimensions, are available during simulation. This approach can lead to a full optimisation of the complete MEMS-CMOS sub-system, with a view to both electrical and mechanical specifications. |
| doi_str_mv | 10.1109/DTIP.2003.1287031 |
| format | Conference Proceeding |
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Technologies. Operation analysis. Testing</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Hardware design languages</topic><topic>Integrated circuits</topic><topic>Libraries</topic><topic>Mathematical model</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>Micromechanical devices</topic><topic>Oscillators</topic><topic>Oscillators, resonators, synthetizers</topic><topic>Packaging</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Theoretical study. 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| identifier | ISBN: 078037066X |
| ispartof | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003, p.176-180 |
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| language | eng |
| recordid | cdi_ieee_primary_1287031 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Applied sciences Circuit properties Circuit simulation CMOS technology Design automation Design. Technologies. Operation analysis. Testing Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Hardware design languages Integrated circuits Libraries Mathematical model Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices Oscillators Oscillators, resonators, synthetizers Packaging Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Theoretical study. Circuits analysis and design |
| title | The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator |
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