A study of electronic interface for MEMS Variable Optical Attenuator (VOA)

A digital electronics control system design for a Microelectromechanical System (MEMS) Variable Optical Attenuator (VOA) is studied. This MEMS VOA is based on applying voltage to position a moving micro-mirror to control the optical power levels. The digital control system reported in this paper is...

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Hauptverfasser: Cai, H., Chan, C.W., Thian, C.S., Zhang, X.M., Lu, C., Liu, A.Q.
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Lu, C.
Liu, A.Q.
description A digital electronics control system design for a Microelectromechanical System (MEMS) Variable Optical Attenuator (VOA) is studied. This MEMS VOA is based on applying voltage to position a moving micro-mirror to control the optical power levels. The digital control system reported in this paper is implemented to operate the MEMS VOA. Here, by use of the proportional integral (PI) controlled system, each VOA module implements the functions as an optical power regulator or optical power equalizer. Moreover, this control system ensures the device with leading performance, stability, reliability and speed, but also fast dynamic response. A more attraction of this electronic control system is its programmability.
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identifier ISBN: 078037066X
ispartof Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003, p.75-78
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language eng
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Applied sciences
Circuit properties
Control systems
Digital circuits
Digital control
Electric variables control
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Microelectromechanical systems
Micromechanical devices
Optical attenuators
Optical control
Optical variables control
Pi control
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Voltage control
title A study of electronic interface for MEMS Variable Optical Attenuator (VOA)
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