Dynamics and touchdown in electrostatic MEMS
A mathematical model of an idealized electrostatically actuated MEMS or NEMS device is presented for the purpose of studying the dynamics of the so-called "pull-in" instability. This arises when applied voltages are increased beyond a certain critical voltage where steady-state solutions c...
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| creator | Flores, G. Mercado, G.A. Pelesko, J.A. |
| description | A mathematical model of an idealized electrostatically actuated MEMS or NEMS device is presented for the purpose of studying the dynamics of the so-called "pull-in" instability. This arises when applied voltages are increased beyond a certain critical voltage where steady-state solutions cease to exist. A reduced one-dimensional nonlinear reaction-diffusion equation representing an idealized electrostatic structure is derived and analyzed. The coefficient tuning the nonlinear part determines existence of steady-state solutions. Questions about where, when, and how touchdown occurs are answered. A summary of new findings is presented and formal analytical results are compared with numerical approximations. |
| doi_str_mv | 10.1109/ICMENS.2003.1221990 |
| format | Conference Proceeding |
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This arises when applied voltages are increased beyond a certain critical voltage where steady-state solutions cease to exist. A reduced one-dimensional nonlinear reaction-diffusion equation representing an idealized electrostatic structure is derived and analyzed. The coefficient tuning the nonlinear part determines existence of steady-state solutions. Questions about where, when, and how touchdown occurs are answered. 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This arises when applied voltages are increased beyond a certain critical voltage where steady-state solutions cease to exist. A reduced one-dimensional nonlinear reaction-diffusion equation representing an idealized electrostatic structure is derived and analyzed. The coefficient tuning the nonlinear part determines existence of steady-state solutions. Questions about where, when, and how touchdown occurs are answered. A summary of new findings is presented and formal analytical results are compared with numerical approximations.</description><subject>Cities and towns</subject><subject>Electrostatic actuators</subject><subject>Electrostatic analysis</subject><subject>Laplace equations</subject><subject>Mathematical model</subject><subject>Micromechanical devices</subject><subject>Nanoelectromechanical systems</subject><subject>Nonlinear equations</subject><subject>Steady-state</subject><subject>Voltage</subject><isbn>9780769519470</isbn><isbn>0769519474</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2003</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj8tKAzEUQAMiKHW-oJt8gDPmJpPHXco4aqGji7brkuaBkXZGJhHp3yvYszm7A4eQJbAGgOHDqhv6t03DGRMNcA6I7IpUqA3TCiVgq9kNqXL-ZH8IlG1rbsn903m0p-QytaOnZfp2H376GWkaaTgGV-YpF1uSo0M_bO7IdbTHHKqLF2T33G-713r9_rLqHtd1Ai1LbSM6VFrKQ4SIynAlnREeuBCeSw4-SoAoeFQOBTLnhPZtQH_wRnLNQCzI8r-bQgj7rzmd7HzeX57EL2tdQJ8</recordid><startdate>2003</startdate><enddate>2003</enddate><creator>Flores, G.</creator><creator>Mercado, G.A.</creator><creator>Pelesko, J.A.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2003</creationdate><title>Dynamics and touchdown in electrostatic MEMS</title><author>Flores, G. ; Mercado, G.A. ; Pelesko, J.A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-af9c96755bf1f968265c83d1233d2521df511f32f6c9390cc37d4e9dbd8527013</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Cities and towns</topic><topic>Electrostatic actuators</topic><topic>Electrostatic analysis</topic><topic>Laplace equations</topic><topic>Mathematical model</topic><topic>Micromechanical devices</topic><topic>Nanoelectromechanical systems</topic><topic>Nonlinear equations</topic><topic>Steady-state</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Flores, G.</creatorcontrib><creatorcontrib>Mercado, G.A.</creatorcontrib><creatorcontrib>Pelesko, J.A.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Flores, G.</au><au>Mercado, G.A.</au><au>Pelesko, J.A.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Dynamics and touchdown in electrostatic MEMS</atitle><btitle>Proceedings International Conference on MEMS, NANO and Smart Systems</btitle><stitle>ICMENS</stitle><date>2003</date><risdate>2003</risdate><spage>182</spage><epage>187</epage><pages>182-187</pages><isbn>9780769519470</isbn><isbn>0769519474</isbn><abstract>A mathematical model of an idealized electrostatically actuated MEMS or NEMS device is presented for the purpose of studying the dynamics of the so-called "pull-in" instability. This arises when applied voltages are increased beyond a certain critical voltage where steady-state solutions cease to exist. A reduced one-dimensional nonlinear reaction-diffusion equation representing an idealized electrostatic structure is derived and analyzed. The coefficient tuning the nonlinear part determines existence of steady-state solutions. Questions about where, when, and how touchdown occurs are answered. A summary of new findings is presented and formal analytical results are compared with numerical approximations.</abstract><pub>IEEE</pub><doi>10.1109/ICMENS.2003.1221990</doi><tpages>6</tpages></addata></record> |
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| ispartof | Proceedings International Conference on MEMS, NANO and Smart Systems, 2003, p.182-187 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Cities and towns Electrostatic actuators Electrostatic analysis Laplace equations Mathematical model Micromechanical devices Nanoelectromechanical systems Nonlinear equations Steady-state Voltage |
| title | Dynamics and touchdown in electrostatic MEMS |
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