A micromachined knife gate valve for high-flow pressure regulation applications
Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The val...
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| container_end_page | 1934 vol.2 |
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| container_issue | |
| container_start_page | 1931 |
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| container_volume | 2 |
| creator | van der Wijngaart, W. Ridgeway, A.S. Stemme, G. |
| description | Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized. |
| doi_str_mv | 10.1109/SENSOR.2003.1217170 |
| format | Conference Proceeding |
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A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.</description><identifier>ISBN: 9780780377318</identifier><identifier>ISBN: 0780377311</identifier><identifier>DOI: 10.1109/SENSOR.2003.1217170</identifier><language>eng</language><publisher>IEEE</publisher><subject>Actuators ; Dynamic range ; Electrical equipment industry ; Force sensors ; Microvalves ; Pneumatic systems ; Pressure control ; Valves ; Vents ; Weight control</subject><ispartof>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. 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The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.</description><subject>Actuators</subject><subject>Dynamic range</subject><subject>Electrical equipment industry</subject><subject>Force sensors</subject><subject>Microvalves</subject><subject>Pneumatic systems</subject><subject>Pressure control</subject><subject>Valves</subject><subject>Vents</subject><subject>Weight control</subject><isbn>9780780377318</isbn><isbn>0780377311</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2003</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj11LwzAYhQMiKLO_YDf5A61J3qRpLseYHzAsOL0eMXnbRtu1JN3Ef-_QHQ485-qBQ8iSs4JzZu53m5dd_VoIxqDggmuu2RXJjK7YuaA18OqGZCl9snPAlKWBW1Kv6BBcHAfrunBAT78OoUHa2hnpyfYnpM0YaRfaLm_68ZtOEVM6RqQR22Nv5zAeqJ2mPri_ne7IdWP7hNmFC_L-sHlbP-Xb-vF5vdrmQQg25-C9KSUo4UBJwZvSWa74hxcemNZSoHPGVk4q1nhpudSgreYKGKAyTllYkOW_NyDifophsPFnf7kNv3yxTkY</recordid><startdate>2003</startdate><enddate>2003</enddate><creator>van der Wijngaart, W.</creator><creator>Ridgeway, A.S.</creator><creator>Stemme, G.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2003</creationdate><title>A micromachined knife gate valve for high-flow pressure regulation applications</title><author>van der Wijngaart, W. ; Ridgeway, A.S. ; Stemme, G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i220t-3dd964352c35421f6ca151bd2d307742ecc9a8c450fd4a14737a715303e59c5a3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Actuators</topic><topic>Dynamic range</topic><topic>Electrical equipment industry</topic><topic>Force sensors</topic><topic>Microvalves</topic><topic>Pneumatic systems</topic><topic>Pressure control</topic><topic>Valves</topic><topic>Vents</topic><topic>Weight control</topic><toplevel>online_resources</toplevel><creatorcontrib>van der Wijngaart, W.</creatorcontrib><creatorcontrib>Ridgeway, A.S.</creatorcontrib><creatorcontrib>Stemme, G.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>van der Wijngaart, W.</au><au>Ridgeway, A.S.</au><au>Stemme, G.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A micromachined knife gate valve for high-flow pressure regulation applications</atitle><btitle>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. 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| ispartof | TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, Vol.2, p.1931-1934 vol.2 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Actuators Dynamic range Electrical equipment industry Force sensors Microvalves Pneumatic systems Pressure control Valves Vents Weight control |
| title | A micromachined knife gate valve for high-flow pressure regulation applications |
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