A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes
A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have g...
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| creator | Tong, H.D. Gielens, F.C. Hoang, H.T. Berenschot, J.W. De Boer, M.J. Gardeniers, J.G.E. Jansen, H.V. Nijdam, W. van Rijn, C.J.M. Elwenspoek, M.C. |
| description | A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours. |
| doi_str_mv | 10.1109/SENSOR.2003.1217122 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_1217122</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1217122</ieee_id><sourcerecordid>1217122</sourcerecordid><originalsourceid>FETCH-LOGICAL-i220t-d1b333ac8280db6813892b3fed696e4422a5aa25e31070941a53ff90fdc5fea63</originalsourceid><addsrcrecordid>eNotUNtqwzAUM4zBRpcv6It_IJntk5sfS-kuUFZYt-fuJD5ePeIk2O1G_n6BVgiEJNCDGFtKkUkp9ON-87bfvWdKCMikkpVU6oYluqrFTKgqkPUdS2L8ETNAl6WGe_a14sfJhOGbeh5pxIAnN_TcD-bcEW8wkuGz_0NLIY0tzqF3bRg8tkfXz-WIXYfGnX0aXfdLgc9-mLgn3wTsKT6wW4tdpOSqC_b5tPlYv6Tb3fPrerVNnVLilBrZAAC2taqFacpaQq1VA5ZMqUvKc6WwQFQFgRSV0LnEAqzVwpq2sIQlLNjysuuI6DAG5zFMh-sP8A8QNFVP</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Tong, H.D. ; Gielens, F.C. ; Hoang, H.T. ; Berenschot, J.W. ; De Boer, M.J. ; Gardeniers, J.G.E. ; Jansen, H.V. ; Nijdam, W. ; van Rijn, C.J.M. ; Elwenspoek, M.C.</creator><creatorcontrib>Tong, H.D. ; Gielens, F.C. ; Hoang, H.T. ; Berenschot, J.W. ; De Boer, M.J. ; Gardeniers, J.G.E. ; Jansen, H.V. ; Nijdam, W. ; van Rijn, C.J.M. ; Elwenspoek, M.C.</creatorcontrib><description>A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours.</description><identifier>ISBN: 9780780377318</identifier><identifier>ISBN: 0780377311</identifier><identifier>DOI: 10.1109/SENSOR.2003.1217122</identifier><language>eng</language><publisher>IEEE</publisher><subject>Bars ; Biomembranes ; Fluid flow measurement ; Hydrogen ; Micromachining ; Permeability ; Robustness ; Temperature ; Testing ; Transistors</subject><ispartof>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, Vol.2, p.1742-1745 vol.2</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1217122$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1217122$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Tong, H.D.</creatorcontrib><creatorcontrib>Gielens, F.C.</creatorcontrib><creatorcontrib>Hoang, H.T.</creatorcontrib><creatorcontrib>Berenschot, J.W.</creatorcontrib><creatorcontrib>De Boer, M.J.</creatorcontrib><creatorcontrib>Gardeniers, J.G.E.</creatorcontrib><creatorcontrib>Jansen, H.V.</creatorcontrib><creatorcontrib>Nijdam, W.</creatorcontrib><creatorcontrib>van Rijn, C.J.M.</creatorcontrib><creatorcontrib>Elwenspoek, M.C.</creatorcontrib><title>A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes</title><title>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)</title><addtitle>SENSOR</addtitle><description>A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours.</description><subject>Bars</subject><subject>Biomembranes</subject><subject>Fluid flow measurement</subject><subject>Hydrogen</subject><subject>Micromachining</subject><subject>Permeability</subject><subject>Robustness</subject><subject>Temperature</subject><subject>Testing</subject><subject>Transistors</subject><isbn>9780780377318</isbn><isbn>0780377311</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2003</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotUNtqwzAUM4zBRpcv6It_IJntk5sfS-kuUFZYt-fuJD5ePeIk2O1G_n6BVgiEJNCDGFtKkUkp9ON-87bfvWdKCMikkpVU6oYluqrFTKgqkPUdS2L8ETNAl6WGe_a14sfJhOGbeh5pxIAnN_TcD-bcEW8wkuGz_0NLIY0tzqF3bRg8tkfXz-WIXYfGnX0aXfdLgc9-mLgn3wTsKT6wW4tdpOSqC_b5tPlYv6Tb3fPrerVNnVLilBrZAAC2taqFacpaQq1VA5ZMqUvKc6WwQFQFgRSV0LnEAqzVwpq2sIQlLNjysuuI6DAG5zFMh-sP8A8QNFVP</recordid><startdate>2003</startdate><enddate>2003</enddate><creator>Tong, H.D.</creator><creator>Gielens, F.C.</creator><creator>Hoang, H.T.</creator><creator>Berenschot, J.W.</creator><creator>De Boer, M.J.</creator><creator>Gardeniers, J.G.E.</creator><creator>Jansen, H.V.</creator><creator>Nijdam, W.</creator><creator>van Rijn, C.J.M.</creator><creator>Elwenspoek, M.C.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2003</creationdate><title>A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes</title><author>Tong, H.D. ; Gielens, F.C. ; Hoang, H.T. ; Berenschot, J.W. ; De Boer, M.J. ; Gardeniers, J.G.E. ; Jansen, H.V. ; Nijdam, W. ; van Rijn, C.J.M. ; Elwenspoek, M.C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i220t-d1b333ac8280db6813892b3fed696e4422a5aa25e31070941a53ff90fdc5fea63</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Bars</topic><topic>Biomembranes</topic><topic>Fluid flow measurement</topic><topic>Hydrogen</topic><topic>Micromachining</topic><topic>Permeability</topic><topic>Robustness</topic><topic>Temperature</topic><topic>Testing</topic><topic>Transistors</topic><toplevel>online_resources</toplevel><creatorcontrib>Tong, H.D.</creatorcontrib><creatorcontrib>Gielens, F.C.</creatorcontrib><creatorcontrib>Hoang, H.T.</creatorcontrib><creatorcontrib>Berenschot, J.W.</creatorcontrib><creatorcontrib>De Boer, M.J.</creatorcontrib><creatorcontrib>Gardeniers, J.G.E.</creatorcontrib><creatorcontrib>Jansen, H.V.</creatorcontrib><creatorcontrib>Nijdam, W.</creatorcontrib><creatorcontrib>van Rijn, C.J.M.</creatorcontrib><creatorcontrib>Elwenspoek, M.C.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Tong, H.D.</au><au>Gielens, F.C.</au><au>Hoang, H.T.</au><au>Berenschot, J.W.</au><au>De Boer, M.J.</au><au>Gardeniers, J.G.E.</au><au>Jansen, H.V.</au><au>Nijdam, W.</au><au>van Rijn, C.J.M.</au><au>Elwenspoek, M.C.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes</atitle><btitle>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)</btitle><stitle>SENSOR</stitle><date>2003</date><risdate>2003</risdate><volume>2</volume><spage>1742</spage><epage>1745 vol.2</epage><pages>1742-1745 vol.2</pages><isbn>9780780377318</isbn><isbn>0780377311</isbn><abstract>A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours.</abstract><pub>IEEE</pub><doi>10.1109/SENSOR.2003.1217122</doi><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 9780780377318 |
| ispartof | TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, Vol.2, p.1742-1745 vol.2 |
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| language | eng |
| recordid | cdi_ieee_primary_1217122 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Bars Biomembranes Fluid flow measurement Hydrogen Micromachining Permeability Robustness Temperature Testing Transistors |
| title | A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T04%3A02%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=A%20hydrogen%20separation%20module%20based%20on%20wafer-scale%20micromachined%20palladium-silver%20alloy%20membranes&rft.btitle=TRANSDUCERS%20'03.%2012th%20International%20Conference%20on%20Solid-State%20Sensors,%20Actuators%20and%20Microsystems.%20Digest%20of%20Technical%20Papers%20(Cat.%20No.03TH8664)&rft.au=Tong,%20H.D.&rft.date=2003&rft.volume=2&rft.spage=1742&rft.epage=1745%20vol.2&rft.pages=1742-1745%20vol.2&rft.isbn=9780780377318&rft.isbn_list=0780377311&rft_id=info:doi/10.1109/SENSOR.2003.1217122&rft_dat=%3Cieee_6IE%3E1217122%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=1217122&rfr_iscdi=true |