Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes
In this paper we introduce a new electrostatic actuator that provides a large increase in neutral position (no rotation) torque and suppression of pull-in compared to a conventional parallel-plate structure. The actuator geometry incorporates raised electrodes on the side of the rotating element tha...
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| creator | Kudrle, T.D. Shedd, G.M. Wang, C.C. Hsiao, J.C. Bancu, M.G. Kirkos, G.A. Yazdi, N. Waelti, M. Sane, H. Mastrangelo, C.H. |
| description | In this paper we introduce a new electrostatic actuator that provides a large increase in neutral position (no rotation) torque and suppression of pull-in compared to a conventional parallel-plate structure. The actuator geometry incorporates raised electrodes on the side of the rotating element that generate torque versus angle behavior much different than convention parallel plate actuators. Using this electrode configuration we have demonstrated 17-degree stable mechanical rotation on large (950 /spl mu/m diameter) mirrors with 100 V single ended drive-a rotation of 60% of the gap. Driving the mirrors with a differential drive scheme we have demonstrated stable 8-degree rotation with as little as /spl plusmn/18 V. |
| doi_str_mv | 10.1109/SENSOR.2003.1215328 |
| format | Conference Proceeding |
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The actuator geometry incorporates raised electrodes on the side of the rotating element that generate torque versus angle behavior much different than convention parallel plate actuators. Using this electrode configuration we have demonstrated 17-degree stable mechanical rotation on large (950 /spl mu/m diameter) mirrors with 100 V single ended drive-a rotation of 60% of the gap. Driving the mirrors with a differential drive scheme we have demonstrated stable 8-degree rotation with as little as /spl plusmn/18 V.</description><identifier>ISBN: 9780780377318</identifier><identifier>ISBN: 0780377311</identifier><identifier>DOI: 10.1109/SENSOR.2003.1215328</identifier><language>eng</language><publisher>IEEE</publisher><subject>Dynamic range ; Electrodes ; Electrostatic actuators ; Geometry ; Mirrors ; Solid modeling ; Solid state circuits ; Torque ; Transducers ; Voltage</subject><ispartof>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. 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Driving the mirrors with a differential drive scheme we have demonstrated stable 8-degree rotation with as little as /spl plusmn/18 V.</description><subject>Dynamic range</subject><subject>Electrodes</subject><subject>Electrostatic actuators</subject><subject>Geometry</subject><subject>Mirrors</subject><subject>Solid modeling</subject><subject>Solid state circuits</subject><subject>Torque</subject><subject>Transducers</subject><subject>Voltage</subject><isbn>9780780377318</isbn><isbn>0780377311</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2003</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo9kM1KxDAUhQMiKGOfYDZ5gdYk1-ZnKcP4A4Mjjq6HtL3RaKatSYr49lYcPBy4i_OduziELDmrOGfmcrd-2G2fKsEYVFzwGoQ-IYVRms0GpYDrM1Kk9M5mgZHSwDn5eJxCKH1P0zSOEVPyQ09t39E8xM8J6cG-9t751ubfYOZGG20IGOgYbEaKAdsch5RnoKW2zZOdm4l--fxGk-_-iQ7TBTl1NiQsjndBXm7Wz6u7crO9vV9db8pWCMhlVxvXNkZL3hlbS-c0GIHIHKtrZ-srBg7BCcUVRw7IFRONkSgBNUrZNLAgy7-_HhH3Y_QHG7_3x0ngBxO5WkI</recordid><startdate>2003</startdate><enddate>2003</enddate><creator>Kudrle, T.D.</creator><creator>Shedd, G.M.</creator><creator>Wang, C.C.</creator><creator>Hsiao, J.C.</creator><creator>Bancu, M.G.</creator><creator>Kirkos, G.A.</creator><creator>Yazdi, N.</creator><creator>Waelti, M.</creator><creator>Sane, H.</creator><creator>Mastrangelo, C.H.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2003</creationdate><title>Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes</title><author>Kudrle, T.D. ; Shedd, G.M. ; Wang, C.C. ; Hsiao, J.C. ; Bancu, M.G. ; Kirkos, G.A. ; Yazdi, N. ; Waelti, M. ; Sane, H. ; Mastrangelo, C.H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c223t-d59fcb9861d9a56ff8392ee0f055fa5403fe3f27171e13e1702b96e63e8e66bb3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Dynamic range</topic><topic>Electrodes</topic><topic>Electrostatic actuators</topic><topic>Geometry</topic><topic>Mirrors</topic><topic>Solid modeling</topic><topic>Solid state circuits</topic><topic>Torque</topic><topic>Transducers</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Kudrle, T.D.</creatorcontrib><creatorcontrib>Shedd, G.M.</creatorcontrib><creatorcontrib>Wang, C.C.</creatorcontrib><creatorcontrib>Hsiao, J.C.</creatorcontrib><creatorcontrib>Bancu, M.G.</creatorcontrib><creatorcontrib>Kirkos, G.A.</creatorcontrib><creatorcontrib>Yazdi, N.</creatorcontrib><creatorcontrib>Waelti, M.</creatorcontrib><creatorcontrib>Sane, H.</creatorcontrib><creatorcontrib>Mastrangelo, C.H.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kudrle, T.D.</au><au>Shedd, G.M.</au><au>Wang, C.C.</au><au>Hsiao, J.C.</au><au>Bancu, M.G.</au><au>Kirkos, G.A.</au><au>Yazdi, N.</au><au>Waelti, M.</au><au>Sane, H.</au><au>Mastrangelo, C.H.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes</atitle><btitle>TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)</btitle><stitle>SENSOR</stitle><date>2003</date><risdate>2003</risdate><volume>1</volume><spage>360</spage><epage>363 vol.1</epage><pages>360-363 vol.1</pages><isbn>9780780377318</isbn><isbn>0780377311</isbn><abstract>In this paper we introduce a new electrostatic actuator that provides a large increase in neutral position (no rotation) torque and suppression of pull-in compared to a conventional parallel-plate structure. The actuator geometry incorporates raised electrodes on the side of the rotating element that generate torque versus angle behavior much different than convention parallel plate actuators. Using this electrode configuration we have demonstrated 17-degree stable mechanical rotation on large (950 /spl mu/m diameter) mirrors with 100 V single ended drive-a rotation of 60% of the gap. Driving the mirrors with a differential drive scheme we have demonstrated stable 8-degree rotation with as little as /spl plusmn/18 V.</abstract><pub>IEEE</pub><doi>10.1109/SENSOR.2003.1215328</doi></addata></record> |
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| identifier | ISBN: 9780780377318 |
| ispartof | TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, Vol.1, p.360-363 vol.1 |
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| language | eng |
| recordid | cdi_ieee_primary_1215328 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Dynamic range Electrodes Electrostatic actuators Geometry Mirrors Solid modeling Solid state circuits Torque Transducers Voltage |
| title | Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes |
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