Microstructural and electrical characterization of gas cluster ion beam-smoothed YBCO films

The decrease in the critical current density (J/sub c/) of YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) films with increasing film thickness was investigated for 0.2 - 2.4-/spl mu/m-thick films grown on single crystal substrates. Microstructural and electrical properties were characterized by focused ion be...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2003-06, Vol.13 (2), p.2470-2473
Hauptverfasser:	Hatzistergos, M.S., Efstathiadis, H., Lifshin, E., Kaloyeros, A.E., Reeves, J.L., Selvamanickam, V., Allen, L.P., MacCrimmon, R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Atomic force microscopy Atomic measurements Critical current density Electronics Exact sciences and technology Force measurement Ion beams Microelectronic fabrication (materials and surfaces technology) Rough surfaces Scanning electron microscopy Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Smoothing methods Surface roughness Yttrium barium copper oxide
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