Investigation of a SiGe HBT during ESD stress in a 0.18-μm SiGe BiCMOS process

This paper investigates the electrostatic discharge (ESD) characteristics of the silicon-germanium heterojunction bipolar transistor (SiGe HBT) in a 0.18-μm SiGe BiCMOS process. According to this letter, the open base configuration in the SiGe HBT has lower trigger voltage and higher ESD robustness...

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Veröffentlicht in:IEEE electron device letters 2003-03, Vol.24 (3), p.168-170, Article 168
Hauptverfasser: Shiao-Shien Chen, Tung-Yang Chen, Tien-Hao Tang, Shao-Chang Huang, Hsu, T.-L., Hua-Chou Tseng, Jen-Kon Chen, Chiu-Hsiang Chou
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container_end_page 170
container_issue 3
container_start_page 168
container_title IEEE electron device letters
container_volume 24
creator Shiao-Shien Chen
Tung-Yang Chen
Tien-Hao Tang
Shao-Chang Huang
Hsu, T.-L.
Hua-Chou Tseng
Jen-Kon Chen
Chiu-Hsiang Chou
description This paper investigates the electrostatic discharge (ESD) characteristics of the silicon-germanium heterojunction bipolar transistor (SiGe HBT) in a 0.18-μm SiGe BiCMOS process. According to this letter, the open base configuration in the SiGe HBT has lower trigger voltage and higher ESD robustness than a common base configuration. As compared to the gate-grounded NMOS and PMOS in a bulk CMOS process, the SiGe HBT has a higher ESD efficiency from the layout area point of view. Additionally, any trigger biases used to improve the ESD robustness of the SiGe HBT are observed as invalid, and even they can work successfully in bulk CMOS process.
doi_str_mv 10.1109/LED.2003.809534
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According to this letter, the open base configuration in the SiGe HBT has lower trigger voltage and higher ESD robustness than a common base configuration. As compared to the gate-grounded NMOS and PMOS in a bulk CMOS process, the SiGe HBT has a higher ESD efficiency from the layout area point of view. Additionally, any trigger biases used to improve the ESD robustness of the SiGe HBT are observed as invalid, and even they can work successfully in bulk CMOS process.</abstract><pub>IEEE</pub><doi>10.1109/LED.2003.809534</doi><tpages>3</tpages></addata></record>
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subjects BiCMOS integrated circuits
CMOS
CMOS process
Devices
Electric potential
Electrostatic discharge
Electrostatic discharges
Germanium silicon alloys
Heterojunction bipolar transistors
MOS devices
Robustness
Silicon germanides
Silicon germanium
Stress
Voltage
title Investigation of a SiGe HBT during ESD stress in a 0.18-μm SiGe BiCMOS process
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