Large format backside illuminated CCD imager for space surveillance

The key features and performance data of a 2560/spl times/1960-pixel split-frame-transfer imager developed for space surveillance is described. The eight-port, backside illuminated charge coupled device (CCD) features 24 /spl mu/m pixels with buried blooming drains to provide 100% optical fill-facto...

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Veröffentlicht in:IEEE transactions on electron devices 2003-01, Vol.50 (1), p.218-224
Hauptverfasser: Tower, J.R., Swain, P.K., Fu-Lung Hsueh, Dawson, R.M., Levine, P.A., Meray, G.M., Andrews, J.T., Frantz, V.L., Grygon, M.S., Reale, M.A., Sudol, T.M.
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container_end_page 224
container_issue 1
container_start_page 218
container_title IEEE transactions on electron devices
container_volume 50
creator Tower, J.R.
Swain, P.K.
Fu-Lung Hsueh
Dawson, R.M.
Levine, P.A.
Meray, G.M.
Andrews, J.T.
Frantz, V.L.
Grygon, M.S.
Reale, M.A.
Sudol, T.M.
description The key features and performance data of a 2560/spl times/1960-pixel split-frame-transfer imager developed for space surveillance is described. The eight-port, backside illuminated charge coupled device (CCD) features 24 /spl mu/m pixels with buried blooming drains to provide 100% optical fill-factor and >1000/spl times/ overload protection from blooming. The imaging and storage registers are strapped with metal to achieve vertical transfer clock rates >400 KHz for the 61 mm long imaging register gates. The 5 million pixel array operates at 2.7 frames/s. The monolithic focal plane includes a 32/spl times/32-pixel frame-transfer imager, with a single output, which operates at 1000 frames/s. The output ports employ a floating diffusion output circuit with responsivity of 10.5 /spl mu/V/e and noise of 7e RMS at a 1.25 MHz clock rate. The imager is photocomposed employing a combination of 5/spl times/ and 1/spl times/ lithography. The photocomposition approach is described.
doi_str_mv 10.1109/TED.2002.807715
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The eight-port, backside illuminated charge coupled device (CCD) features 24 /spl mu/m pixels with buried blooming drains to provide 100% optical fill-factor and &gt;1000/spl times/ overload protection from blooming. The imaging and storage registers are strapped with metal to achieve vertical transfer clock rates &gt;400 KHz for the 61 mm long imaging register gates. The 5 million pixel array operates at 2.7 frames/s. The monolithic focal plane includes a 32/spl times/32-pixel frame-transfer imager, with a single output, which operates at 1000 frames/s. The output ports employ a floating diffusion output circuit with responsivity of 10.5 /spl mu/V/e and noise of 7e RMS at a 1.25 MHz clock rate. The imager is photocomposed employing a combination of 5/spl times/ and 1/spl times/ lithography. The photocomposition approach is described.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TED.2002.807715</doi><tpages>7</tpages></addata></record>
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subjects Blooms (metal)
Charge coupled devices
Charge coupled image sensors
Clocks
Focal plane
Imaging
Integrated circuit noise
Pixels
Registers
Space surveillance
Surveillance
title Large format backside illuminated CCD imager for space surveillance
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