A Manufacturing Process for Analog and Digital Gallium Arsenide Integrated Circuits

A process for manufacturing small-to-medium scale GaAs integrated circuits is described. Integrated FET's, diodes, resistors, thin-film capacitors, and inductors are used for monolithic integration of digital and analog circuits. Direct implantation of Si into >10/sup 5/ omega/spl dot/cm res...

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Veröffentlicht in:	IEEE transactions on microwave theory and techniques 1982-07, Vol.30 (7), p.935-942
Hauptverfasser:	Van Tuyl, R.L., Kumar, V., D'Avanzo, D.C., Taylor, T.W., Peterson, V.E., Hornbuckle, D.P., Fisher, R.A., Estreich, D.B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analog integrated circuits Automatic testing Circuit testing Dielectric substrates Digital integrated circuits Gallium arsenide Integrated circuit manufacture Manufacturing processes System testing Thin film inductors
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