textit -Axis Oriented HZO on Flat Amorphous TiN Achieving High Uniformity, Breakdown Field, Final 2P } , and Endurance

Metal-ferroelectric-metal (MFM) capacitors with flat amorphous TiN are demonstrated to achieve the \textit{c} -axis of orthorhombic phase (o-phase) well-aligned along the deposition direction, uniform electric field, negligible fatigue, and a high remanent polarization (2P _{\text{r}} ) of 62 \mu...

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