Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints

Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In operating such tools, LLM plays a pivotal role. Additionally, wafer fabrication in VM faces strict wafer resid...

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Veröffentlicht in:	IEEE transactions on automation science and engineering 2024-12, p.1-15
Hauptverfasser:	Huang, BaoYing, Wu, NaiQi, Qiao, Yan, Guo, WeiWen
Format:	Artikel
Sprache:	eng
Schlagworte:	cluster tools Clustering algorithms Job shop scheduling Loading Optimal scheduling Petri nets Robot kinematics Schedules scheduling Semiconductor manufacturing Time factors Transportation
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