Laser Micromachining of 2-D Microstrip V-Band Meander-Line Slow Wave Structures

Vacuum electron devices operating at sub-THz frequencies require miniaturized high-frequency electromagnetic interaction structures manufactured using high-precision micromachining technologies. In this article, we present the results of microfabrication of 2-D planar microstrip periodic slow wave s...

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Veröffentlicht in:	IEEE transactions on electron devices 2024-12, p.1-6
Hauptverfasser:	Nozhkin, Dmitrii A., Starodubov, Andrei V., Torgashov, Roman A., Galushka, Viktor V., Kozhevnikov, Ilya O., Serdobintsev, Alexey A., Lebedev, Alexey D., Kozyrev, Anton A., Ryskin, Nikita M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Copper Fiber lasers Laser beams Laser micromachining Microfabrication Micromachining Microstrip microstrip meander line (MML) millimeter band Pulsed laser deposition Scanning electron microscopy slow wave structure (SWS) Sputtering Substrates
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