Dynamic Error Modeling and Compensation of a Scanning Probe on CMM

The raising demand for high-efficiency inspection in industrial manufacturing has significantly increased the required measurement speed, resulting in extra dynamic errors during measurement. Although the dynamic error modeling and compensation for the coordinate measuring machine (CMM) have been widely investigated, the influence of the dynamic error on the scanning probe system has attracted few attention. In this article, the dynamic performance of the scanning probe is analyzed, and the dynamic error is modeled as the constant time delay in the response of a second-order system subjected to the ramp excitation. The delay-inclusive probe model is proposed to compensate the dynamic error in the probe signal, and the corresponding calibration method is given to identify the constant time delay, which only requires to probe 25 points on a sphere. Three sets of probing and scanning experiments are conducted to compare the accuracy of the proposed method against the existing methods in high-speed measurement. Although the probing accuracy with the existing calibration methods is reduced to several tens of micrometers in high-speed probing, the proposed method maintains microlevel accuracy, which is basically identical to the accuracy in low speed. Moreover, the calibration time for the proposed method is only 17.4% of the Renishaw commercial calibration method.