Highly Doped Single Crystal Al₁-ₓScₓN Bulk Acoustic Resonators for High-Frequency and Wideband Applications

This work reports a super high-frequency (SHF) bulk acoustic wave (BAW) resonator, utilizing a single crystal aluminum scandium (Sc) nitride (Al _{{1}-{x}} Sc x N) piezoelectric film with 30% Sc concentration, fabricated by a novel cavity-embedded process and exhibiting an effective electromechanica...

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Veröffentlicht in:	IEEE transactions on electron devices 2024-10, Vol.71 (10), p.6329-6335
Hauptverfasser:	Zhou, Congquan, Dou, Wentong, Qin, Ruidong, Lu, Jinghong, Yang, Yumeng, Mu, Zhiqiang, Yu, Wenjie
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic resonator Aluminum nitride aluminum scandium (Sc) nitride bulk acoustic wave (BAW) filter cavity-embedded III-V semiconductor materials Piezoelectric films Resonators Rough surfaces single crystal Stress Surface roughness
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