Wafer-Scale Fabricated On-Chip Thermionic Electron Sources Based on a Suspended Y2O3/TiN Filament
On-chip electron emission sources are indispensable for developing miniature and integrated vacuum electronic devices on a chip. Here, a new on-chip electron source based on thermionic electron emission from a suspended Y 2 O 3 /TiN filament is reported. These thermionic electron sources are fabrica...
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| Veröffentlicht in: | IEEE electron device letters 2024-10, Vol.45 (10), p.1977-1980 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
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| container_end_page | 1980 |
|---|---|
| container_issue | 10 |
| container_start_page | 1977 |
| container_title | IEEE electron device letters |
| container_volume | 45 |
| creator | Rao, Weidong Li, Zhiwei Guo, Dengzhu Li, Yang Zhu, Taoyuan Wei, Xianlong |
| description | On-chip electron emission sources are indispensable for developing miniature and integrated vacuum electronic devices on a chip. Here, a new on-chip electron source based on thermionic electron emission from a suspended Y 2 O 3 /TiN filament is reported. These thermionic electron sources are fabricated in batches on silicon wafers by microfabrication technologies. Benefit from the low work function of Y 2 O 3 , our on-chip thermionic sources exhibit an emission current of up to 1 mA and an emission density of up to 19.3 A/cm 2 at temperature of just 1990 K, much lower than those of previously-reported on-chip thermionic sources of W and carbon nanomaterials filaments with similar emission performances. |
| doi_str_mv | 10.1109/LED.2024.3446637 |
| format | Article |
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| ispartof | IEEE electron device letters, 2024-10, Vol.45 (10), p.1977-1980 |
| issn | 0741-3106 |
| language | eng |
| recordid | cdi_ieee_primary_10640137 |
| source | IEEE Electronic Library (IEL) |
| subjects | Electron sources On-chip electron source Scanning electron microscopy Silicon Substrates System-on-chip thermionic electron source Thermionic emission Tin vacuum electronics yttrium oxide |
| title | Wafer-Scale Fabricated On-Chip Thermionic Electron Sources Based on a Suspended Y2O3/TiN Filament |
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