Effect of Substrate Temperature on Temperature Sensitivity and Magnetoresistance of CrOxNy Thin Film Cryogenic Sensor

The demand for high-precision temperature measurement is expanding into the fields of deep low-temperature and strong magnetic field, and CrOxNy thin film sensor has shown good prospects in these fields for its high sensitivities, high thermal cycling stability, and low magnetoresistance. The substr...

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Veröffentlicht in:	IEEE sensors journal 2024-08, Vol.24 (16), p.25354-25359
Hauptverfasser:	Shen, Yudong, Li, Yanjie, Ran, Yongpeng, Zhu, Kanglai, Wen, Yuntong, You, Minmin, Liu, Jingquan, Lin, Zude
Format:	Artikel
Sprache:	eng
Schlagworte:	CrOxNy thin film cryogenic Magnetic fields Magnetic sensors Magnetoresistance Sensitivity Sensors strong magnetic field Substrates temperature sensor Temperature sensors
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