The electronics of a control system for micromirrors in a laser-scanning device
The electronics and software developed for the control system of a micromirror-based laser-scanning endoscope are presented in conjunction with features of the micromirrors and their driving requirements. These micromirrors, which are crucial for the laser-scanning operation of the endoscope device,...
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| container_end_page | 1210 vol.3 |
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| creator | Anagnostopoulos, G.P. Wagner, B. Papageorgas, P.G. Hofmann, U. Maroulis, D. Theofanous, N.G. |
| description | The electronics and software developed for the control system of a micromirror-based laser-scanning endoscope are presented in conjunction with features of the micromirrors and their driving requirements. These micromirrors, which are crucial for the laser-scanning operation of the endoscope device, are embedded in the endoscope head and have been manufactured using silicon MEMS (Micro Electro-Mechanical Systems) technology. The micromirrors are electrostatically deflected and driven by appropriate high-voltage waveforms created in the control system. This computer-based system, using appropriate software, generates the control waveforms, which, after adequate amplification, drive the scanning micromirrors. The electronics developed are capable of generating control voltages with amplitudes up to 440 V pk-pk, within a bandwidth from DC to 20 kHz, and ensures an electrostatic driving of scanning micromirrors with a high positioning accuracy in the sub-pixel range. |
| doi_str_mv | 10.1109/ICECS.2002.1046470 |
| format | Conference Proceeding |
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These micromirrors, which are crucial for the laser-scanning operation of the endoscope device, are embedded in the endoscope head and have been manufactured using silicon MEMS (Micro Electro-Mechanical Systems) technology. The micromirrors are electrostatically deflected and driven by appropriate high-voltage waveforms created in the control system. This computer-based system, using appropriate software, generates the control waveforms, which, after adequate amplification, drive the scanning micromirrors. The electronics developed are capable of generating control voltages with amplitudes up to 440 V pk-pk, within a bandwidth from DC to 20 kHz, and ensures an electrostatic driving of scanning micromirrors with a high positioning accuracy in the sub-pixel range.</description><identifier>ISBN: 9780780375963</identifier><identifier>ISBN: 0780375963</identifier><identifier>DOI: 10.1109/ICECS.2002.1046470</identifier><language>eng</language><publisher>IEEE</publisher><subject>Control systems ; DC generators ; Drives ; Endoscopes ; Manufacturing ; Micromechanical devices ; Micromirrors ; Optical control ; Silicon ; Software systems</subject><ispartof>9th International Conference on Electronics, Circuits and Systems, 2002, Vol.3, p.1207-1210 vol.3</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1046470$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1046470$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Anagnostopoulos, G.P.</creatorcontrib><creatorcontrib>Wagner, B.</creatorcontrib><creatorcontrib>Papageorgas, P.G.</creatorcontrib><creatorcontrib>Hofmann, U.</creatorcontrib><creatorcontrib>Maroulis, D.</creatorcontrib><creatorcontrib>Theofanous, N.G.</creatorcontrib><title>The electronics of a control system for micromirrors in a laser-scanning device</title><title>9th International Conference on Electronics, Circuits and Systems</title><addtitle>ICECS</addtitle><description>The electronics and software developed for the control system of a micromirror-based laser-scanning endoscope are presented in conjunction with features of the micromirrors and their driving requirements. These micromirrors, which are crucial for the laser-scanning operation of the endoscope device, are embedded in the endoscope head and have been manufactured using silicon MEMS (Micro Electro-Mechanical Systems) technology. The micromirrors are electrostatically deflected and driven by appropriate high-voltage waveforms created in the control system. This computer-based system, using appropriate software, generates the control waveforms, which, after adequate amplification, drive the scanning micromirrors. The electronics developed are capable of generating control voltages with amplitudes up to 440 V pk-pk, within a bandwidth from DC to 20 kHz, and ensures an electrostatic driving of scanning micromirrors with a high positioning accuracy in the sub-pixel range.</description><subject>Control systems</subject><subject>DC generators</subject><subject>Drives</subject><subject>Endoscopes</subject><subject>Manufacturing</subject><subject>Micromechanical devices</subject><subject>Micromirrors</subject><subject>Optical control</subject><subject>Silicon</subject><subject>Software systems</subject><isbn>9780780375963</isbn><isbn>0780375963</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2002</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj91KAzEUhAMiKHVfQG_yAruek59N91KWqoVCL1qvS5qcaGQ3K8ki9O1dsMPA8MEwMIw9IjSI0D1v-01_aASAaBBUqwzcsKoza1gsje5aeceqUr5hkdIKtLhn--MXcRrIzXlK0RU-BW65m9LCAy-XMtPIw5T5GF2expjzlAuPaSkNtlCui7MpxfTJPf1GRw_sNtihUHXNFft43Rz793q3f9v2L7s6otFz7QwGC9IbMr7V6EhaAAzeoSbTai06icoZL84Ia49ogrYGlLeeROvPTq7Y0_9uJKLTT46jzZfT9bb8AweOTlk</recordid><startdate>2002</startdate><enddate>2002</enddate><creator>Anagnostopoulos, G.P.</creator><creator>Wagner, B.</creator><creator>Papageorgas, P.G.</creator><creator>Hofmann, U.</creator><creator>Maroulis, D.</creator><creator>Theofanous, N.G.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2002</creationdate><title>The electronics of a control system for micromirrors in a laser-scanning device</title><author>Anagnostopoulos, G.P. ; Wagner, B. ; Papageorgas, P.G. ; Hofmann, U. ; Maroulis, D. ; Theofanous, N.G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-c71fa03d7e7d651ce3a001fdc15e765529314c7d2b108d117f5a704dade26dbc3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Control systems</topic><topic>DC generators</topic><topic>Drives</topic><topic>Endoscopes</topic><topic>Manufacturing</topic><topic>Micromechanical devices</topic><topic>Micromirrors</topic><topic>Optical control</topic><topic>Silicon</topic><topic>Software systems</topic><toplevel>online_resources</toplevel><creatorcontrib>Anagnostopoulos, G.P.</creatorcontrib><creatorcontrib>Wagner, B.</creatorcontrib><creatorcontrib>Papageorgas, P.G.</creatorcontrib><creatorcontrib>Hofmann, U.</creatorcontrib><creatorcontrib>Maroulis, D.</creatorcontrib><creatorcontrib>Theofanous, N.G.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Anagnostopoulos, G.P.</au><au>Wagner, B.</au><au>Papageorgas, P.G.</au><au>Hofmann, U.</au><au>Maroulis, D.</au><au>Theofanous, N.G.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>The electronics of a control system for micromirrors in a laser-scanning device</atitle><btitle>9th International Conference on Electronics, Circuits and Systems</btitle><stitle>ICECS</stitle><date>2002</date><risdate>2002</risdate><volume>3</volume><spage>1207</spage><epage>1210 vol.3</epage><pages>1207-1210 vol.3</pages><isbn>9780780375963</isbn><isbn>0780375963</isbn><abstract>The electronics and software developed for the control system of a micromirror-based laser-scanning endoscope are presented in conjunction with features of the micromirrors and their driving requirements. These micromirrors, which are crucial for the laser-scanning operation of the endoscope device, are embedded in the endoscope head and have been manufactured using silicon MEMS (Micro Electro-Mechanical Systems) technology. The micromirrors are electrostatically deflected and driven by appropriate high-voltage waveforms created in the control system. This computer-based system, using appropriate software, generates the control waveforms, which, after adequate amplification, drive the scanning micromirrors. The electronics developed are capable of generating control voltages with amplitudes up to 440 V pk-pk, within a bandwidth from DC to 20 kHz, and ensures an electrostatic driving of scanning micromirrors with a high positioning accuracy in the sub-pixel range.</abstract><pub>IEEE</pub><doi>10.1109/ICECS.2002.1046470</doi></addata></record> |
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| identifier | ISBN: 9780780375963 |
| ispartof | 9th International Conference on Electronics, Circuits and Systems, 2002, Vol.3, p.1207-1210 vol.3 |
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| language | eng |
| recordid | cdi_ieee_primary_1046470 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Control systems DC generators Drives Endoscopes Manufacturing Micromechanical devices Micromirrors Optical control Silicon Software systems |
| title | The electronics of a control system for micromirrors in a laser-scanning device |
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