Experimental definition of constants a deformation potential n- and p-silicon
At deformation of semiconducting chips the deformation change of energy charge carriers is determined by value constants of a deformation potential. These constants play an essential role in the description of kinetic effects, but the finding of their numerical values introduces considerable difficu...
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| Zusammenfassung: | At deformation of semiconducting chips the deformation change of energy charge carriers is determined by value constants of a deformation potential. These constants play an essential role in the description of kinetic effects, but the finding of their numerical values introduces considerable difficulties and frequently has evaluation nature. Therefore given activity is dedicated to experimental definition of some constants of a deformation potential in single-crystal silicon. |
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| DOI: | 10.1109/APEDE.2002.1044938 |