A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length
It is a longstanding issue that high-order width-extensional (WE) piezoelectric microelectromechanical system (MEMS) resonators suffer low quality factors (Q-factors). In this study, it is observed that the mode distortion occurs in each unit when it couples with each other to constitute the high-or...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2024-04, Vol.33 (2), p.130-132 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Lv, Liangliang Yang, Qingrui Li, Haolin Wang, Zhaoxun Li, Quanning Chen, Xuejiao Zhang, Menglun Pang, Wei |
| description | It is a longstanding issue that high-order width-extensional (WE) piezoelectric microelectromechanical system (MEMS) resonators suffer low quality factors (Q-factors). In this study, it is observed that the mode distortion occurs in each unit when it couples with each other to constitute the high-order WE-mode resonator, leading to a decreased Q-factor. Based on this finding, we propose a new Q-factor boost strategy by improving mode matching degree between adjacent units from the view of dividing the high-order resonator into units. Both simulation and experimental results show a significant improvement in mode matching degree between adjacent units with varied unit length. Resonator's Q-factor measured in air improved by 53% compared with the conventional resonator with constant unit length. It is believed that the proposed strategy could apply to other WE-mode MEMS resonators with different orders or dimensions; and Q-factor can be further improved by combining the proposed method with traditional energy reflection methods. [2023-0201] |
| doi_str_mv | 10.1109/JMEMS.2024.3355400 |
| format | Article |
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In this study, it is observed that the mode distortion occurs in each unit when it couples with each other to constitute the high-order WE-mode resonator, leading to a decreased Q-factor. Based on this finding, we propose a new Q-factor boost strategy by improving mode matching degree between adjacent units from the view of dividing the high-order resonator into units. Both simulation and experimental results show a significant improvement in mode matching degree between adjacent units with varied unit length. Resonator's Q-factor measured in air improved by 53% compared with the conventional resonator with constant unit length. It is believed that the proposed strategy could apply to other WE-mode MEMS resonators with different orders or dimensions; and Q-factor can be further improved by combining the proposed method with traditional energy reflection methods. [2023-0201]</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2024.3355400</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Aluminum nitride ; high-order width-extensional mode ; Impedance ; Matching ; Microelectromechanical systems ; Micromechanical devices ; mode distortion and mode matching ; Mode matching methods ; Piezoelectric devices ; Piezoelectric MEMS resonator ; Piezoelectricity ; Q factors ; Q-factor ; Resonators</subject><ispartof>Journal of microelectromechanical systems, 2024-04, Vol.33 (2), p.130-132</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2024</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c162t-18d04b3f80e56ffb9e433f7cf9ac637be41b8e041469dd77d68ca4336fec12cb3</cites><orcidid>0000-0003-0463-8549 ; 0009-0001-2112-231X ; 0009-0008-9581-9380 ; 0000-0002-5174-7812</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/10416723$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/10416723$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Lv, Liangliang</creatorcontrib><creatorcontrib>Yang, Qingrui</creatorcontrib><creatorcontrib>Li, Haolin</creatorcontrib><creatorcontrib>Wang, Zhaoxun</creatorcontrib><creatorcontrib>Li, Quanning</creatorcontrib><creatorcontrib>Chen, Xuejiao</creatorcontrib><creatorcontrib>Zhang, Menglun</creatorcontrib><creatorcontrib>Pang, Wei</creatorcontrib><title>A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>It is a longstanding issue that high-order width-extensional (WE) piezoelectric microelectromechanical system (MEMS) resonators suffer low quality factors (Q-factors). In this study, it is observed that the mode distortion occurs in each unit when it couples with each other to constitute the high-order WE-mode resonator, leading to a decreased Q-factor. Based on this finding, we propose a new Q-factor boost strategy by improving mode matching degree between adjacent units from the view of dividing the high-order resonator into units. Both simulation and experimental results show a significant improvement in mode matching degree between adjacent units with varied unit length. Resonator's Q-factor measured in air improved by 53% compared with the conventional resonator with constant unit length. It is believed that the proposed strategy could apply to other WE-mode MEMS resonators with different orders or dimensions; and Q-factor can be further improved by combining the proposed method with traditional energy reflection methods. [2023-0201]</description><subject>Aluminum nitride</subject><subject>high-order width-extensional mode</subject><subject>Impedance</subject><subject>Matching</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>mode distortion and mode matching</subject><subject>Mode matching methods</subject><subject>Piezoelectric devices</subject><subject>Piezoelectric MEMS resonator</subject><subject>Piezoelectricity</subject><subject>Q factors</subject><subject>Q-factor</subject><subject>Resonators</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpNkEtPQjEQhRujiYj-AeOiietiX_e1RIKigRBFdNn03k7hEqTalkT-vUVYuJrJyXfOTA5C14z2GKPV3fNkOJn1OOWyJ0SWSUpPUIdVkhHKsvI07TQrSMGy4hxdhLCilElZ5h0EffxCrG6i8_jeuRDxLHodYbHDNkmjdrEkU2_A44_WxCUZ_kTYhNZt9BpPnAG8P4xfISQlZQRc7_C79i0YPN-0EY9hs4jLS3Rm9TrA1XF20fxh-DYYkfH08WnQH5OG5TwSVhoqa2FLCllubV2BFMIWja10k4uiBsnqEqhkMq-MKQqTl41OSG6hYbypRRfdHnK_vPveQohq5bY-_RqUoInjsix5oviBarwLwYNVX7791H6nGFX7OtVfnWpfpzrWmUw3B1MLAP8MkuUFF-IXnEpw6A</recordid><startdate>20240401</startdate><enddate>20240401</enddate><creator>Lv, Liangliang</creator><creator>Yang, Qingrui</creator><creator>Li, Haolin</creator><creator>Wang, Zhaoxun</creator><creator>Li, Quanning</creator><creator>Chen, Xuejiao</creator><creator>Zhang, Menglun</creator><creator>Pang, Wei</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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In this study, it is observed that the mode distortion occurs in each unit when it couples with each other to constitute the high-order WE-mode resonator, leading to a decreased Q-factor. Based on this finding, we propose a new Q-factor boost strategy by improving mode matching degree between adjacent units from the view of dividing the high-order resonator into units. Both simulation and experimental results show a significant improvement in mode matching degree between adjacent units with varied unit length. Resonator's Q-factor measured in air improved by 53% compared with the conventional resonator with constant unit length. It is believed that the proposed strategy could apply to other WE-mode MEMS resonators with different orders or dimensions; and Q-factor can be further improved by combining the proposed method with traditional energy reflection methods. 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| subjects | Aluminum nitride high-order width-extensional mode Impedance Matching Microelectromechanical systems Micromechanical devices mode distortion and mode matching Mode matching methods Piezoelectric devices Piezoelectric MEMS resonator Piezoelectricity Q factors Q-factor Resonators |
| title | A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length |
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