A Novel Four-Port Symmetric Probe Calibration Method for On-Wafer S-Parameter Measurement

This article presents a novel four-port symmetric probe calibration method for on-wafer S-parameter measurement, where by using the symmetric property of the probes, the four-port calibration process is greatly simplified while maintaining a high calibration accuracy. Only four measurements with fou...

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Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2024-05, Vol.72 (5), p.3091-3101
Hauptverfasser:	Zhou, Jiefeng, Zhang, Ling, Ma, Hanzhi, Li, Da, Chen, Ziyang, Li, Er-Ping
Format:	Artikel
Sprache:	eng
Schlagworte:	Calibration Crosstalk Four-port calibration ground–signal–signal–ground (GSSG) and ground–signal–ground–signal–ground (GSGSG) probes on-wafer S-parameter measurement Parameters parasitic parameters Probes Scattering parameters Symmetric matrices symmetric probe Transmission line matrix methods
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