Modal method in deep metal-dielectric gratings : the decisive role of hidden modes

The modal method is well adapted for the modeling of deep-groove, high-contrast gratings of short period, possibly involving metal parts. Yet problems remain in the case of the TM polarization in the presence of metal parts in the corrugations: whereas most of the diffraction features are explained...

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Veröffentlicht in:	Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2006-10, Vol.23 (10), p.2501-2509
Hauptverfasser:	FORESTI, Maud, MENEZ, Ludivine, TISHCHENKO, Alexander V
Format:	Artikel
Sprache:	eng
Schlagworte:	Diffraction and scattering Engineering Sciences Exact sciences and technology Fundamental areas of phenomenology (including applications) Gratings Optical elements, devices, and systems Optics Photonic Physics Wave optics
Online-Zugang:	Volltext
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