Modal method in deep metal-dielectric gratings : the decisive role of hidden modes
The modal method is well adapted for the modeling of deep-groove, high-contrast gratings of short period, possibly involving metal parts. Yet problems remain in the case of the TM polarization in the presence of metal parts in the corrugations: whereas most of the diffraction features are explained...
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Veröffentlicht in: | Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2006-10, Vol.23 (10), p.2501-2509 |
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creator | FORESTI, Maud MENEZ, Ludivine TISHCHENKO, Alexander V |
description | The modal method is well adapted for the modeling of deep-groove, high-contrast gratings of short period, possibly involving metal parts. Yet problems remain in the case of the TM polarization in the presence of metal parts in the corrugations: whereas most of the diffraction features are explained by the interplay of an astonishingly small number of true propagating and low-order evanescent modes, the exact solution of the diffraction problem requires the contribution of two types of evanescent modes that are usually overlooked. We investigate the nature and the role of these modes and show that metal gratings can be treated exactly by the modal method. |
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subjects | Diffraction and scattering Engineering Sciences Exact sciences and technology Fundamental areas of phenomenology (including applications) Gratings Optical elements, devices, and systems Optics Photonic Physics Wave optics |
title | Modal method in deep metal-dielectric gratings : the decisive role of hidden modes |
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