Resolution evaluation of 6-degree-of-freedom precision positioning systems: Definitions and apparatus

•Resolution is a key criterion in 6 degrees of freedom precision positioning systems.•A resolution characterisation method founded on stability and motion increment length is proposed.•A new 6 DOF measurement system has been developed to assess resolution.•The uncertainty of our measurement system w...

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Veröffentlicht in:	Measurement : journal of the International Measurement Confederation 2020-02, Vol.152, p.107375, Article 107375
Hauptverfasser:	Vissière, Alain, Krut, Sébastien, Company, Olivier, Roux, Thierry, Noiré, Pierre, Pierrot, Francois
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Automatic Capacitive sensor Degrees of freedom Engineering Sciences Evaluation Hexapod Measurement Monte Carlo method Monte Carlo simulation Motion stability Nano-positioning system Precision Resolution Sensors Stability criteria Stewart platform Uncertainty User requirements
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