Development of a low-cost piezoresistive compass on CMOS

This paper presents the design and the prototyping of a low-cost monolithic CMOS compass. The system is based on a pair of piezoresistive cantilevers actuated by the Lorenz force. A special focus is given to the conditioning circuitry, which has been designed to improve sensor performances with resp...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2006-08, Vol.130, p.302-311
Hauptverfasser:	Dumas, N., Latorre, L., Nouet, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	CMOS MEMS Compass Engineering Sciences Magnetic Micro and nanotechnologies Microelectronics Sensor
Online-Zugang:	Volltext
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